Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability
AssigneeKLA-Tencor Corporation
InventorsTomas Plettner, John David Gerling, Mohammed Tahmassebpur
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Abstract
A permanent-magnet particle beam apparatus and method incorporating a non-magnetic portion for tunability are provided. The permanent-magnet particle beam apparatus includes a particle beam emitter that emits a charged particle beam, and includes a set of permanent magnets forming a magnetic field for controlling condensing of the charged particle beam. The permanent-magnet particle beam apparatus further includes a non-magnetic electrical conductor component situated with the set of permanent magnets to control a kinetic energy of the charged particle beam moving through the magnetic field.
Claims18
A permanent-magnet particle beam apparatus, comprising:
- charged particle beam emitter that emits a particle beam;
- a set of permanent magnets forming a magnetic field for controlling condensing of the charged particle beam;
- and
- a non-magnetic electrical conductor component situated with the set of permanent magnets to control kinetic energy of the charged particle beam moving through the magnetic field.
A method for controlling a particle beam through a permanent-magnet particle beam apparatus, comprising:
- emitting, by a particle beam emitter, a charged particle beam;
- transmitting the charged particle beam through a magnetic field formed by a set of permanent magnets for controlling condensing of the charged particle beam;
- and
- controlling a kinetic energy of the charged particle beam moving through the magnetic field using a non-magnetic electrical conductor component situated with the set of permanent magnets.
Dependencies are inferred from the claim text.