Fluid delivery system and method
AssigneeEntegris, Inc.
InventorsGlenn TOM, Donald WARE, Richard CHISM, Jordan HODGES, Wes McFERON
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Abstract
A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
Claims12
A fluid supply system adapted for vacuum and pressure cycling of fluid,
- the system comprising:
- a process canister adapted for delivery of fluid to a location of use;
- and
- a transfer vessel adapted to supply the process canister with fluid from at least one bulk canister,
- the fluid supply system being characterized by the transfer vessel coupled with (i) a vacuum source arranged for drawing fluid from the at least one bulk canister into the transfer vessel (103) and selectively maintaining a vacuum condition in the at least one bulk canister, and (ii) a first source of pressurizing gas arranged for pressure-mediated transfer of fluid from the transfer vessel into said process canister.
A method of delivering fluid for use thereof, the method characterized by:
- drawing fluid under vacuum from at least one bulk canister into a transfer vessel;
- pressurizing the transfer vessel to dispense the fluid to a process container;
- and
- selectively maintaining a vacuum condition in the at least one bulk canister.
12-42. (canceled)
Dependencies are inferred from the claim text.