Micro-hole array and method for manufacturing same
AssigneeNippon Electric Glass Co., Ltd.
InventorsMasanori WADA, Toru HIRAO
Life of this patent
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Abstract
Provided are a micro-hole array capable of accurately holding optical fibers or the like and a method for manufacturing a micro-hole array by which micro-holes having high shape accuracy can be formed. A micro-hole array has thirty or more through holes 3 formed per cm2 in a glass plate 2 with a thickness of 0.5 mm to 5 mm, both inclusive, the through holes 3 each having a cylindrical portion 5 having a cylindricity of 5% or less of a hole diameter d1 of the through hole 3.
Claims9
A micro-hole array having thirty or more through holes formed per cm2 in a glass plate with a thickness of 0.5 mm to 5 mm, both inclusive, the through holes each having a cylindrical portion having a cylindricity of 5% or less of a hole diameter of the through hole.
A method for manufacturing a micro-hole array in which a plurality of through holes are formed in a glass plate having a first principal surface and a second principal surface by laser irradiation to pass through the glass plate from the first principal surface to the second principal surface, the method comprising the steps of:
- bringing the first principal surface into contact with a liquid transparent to laser;
- and
- using pulsed laser having a duration of 10 picoseconds or less as the laser to irradiate the glass plate with the laser from the second principal surface side to focus the laser on portions of the first principal surface in contact with the liquid, thus forming the through holes.
Dependencies are inferred from the claim text.