Electromechanical-transducing electronic component, liquid discharge head, liquid discharge device, and liquid discharge apparatus

An electromechanical-transducing electronic component comprising at least one element array in which a plurality of electromechanical transducer elements are arrayed,

• each of the plurality of electromechanical transducer elements including:
• a first electrode;
• a piezoelectric material on the first electrode;
• and
• a second electrode on the piezoelectric material,
• each of the plurality of electromechanical transducer elements configured to apply a voltage according to a drive signal between the first electrode and the second electrode to deform the piezoelectric material,
• wherein the piezoelectric material is made of a composite oxide having a perovskite structure preferentially oriented to at least one of a (100) plane and a (001) plane and has a drop of diffraction intensity in a diffraction intensity profile obtained when a tilt angle χ is changed at a position (2θ=θmax) of a diffraction peak intensity P where the diffraction intensity is largest in a diffraction intensity peak corresponding to the at least one of the (200) plane and the (002) plane out of diffraction intensity peaks measured by an X-ray diffraction θ-2θ method,
• wherein ΔP1/P1AVE is equal to or less than 20% where P1AVE represents an average of a diffraction peak intensity P1 of χ=0° in each of the at least one element array in the piezoelectric material of each of the plurality of electromechanical transducer elements and ΔP1 represents a maximum difference of the diffraction peak intensity P1 in each of the at least one element array.

An electromechanical-transducing electronic component comprising at least one element array in which a plurality of electromechanical transducer elements are arrayed,

• each of the plurality of electromechanical transducer elements including:
• a first electrode;
• a piezoelectric material on the first electrode;
• and
• a second electrode on the piezoelectric material,
• each of the plurality of electromechanical transducer elements configured to apply a voltage according to a drive signal between the first electrode and the second electrode to deform the piezoelectric material,
• wherein the piezoelectric material is made of a composite oxide having a perovskite structure preferentially oriented to at least one of a (100) plane and a (001) plane and has a drop of diffraction intensity in a rocking curve corresponding to at least one of a (200) plane and a (002) plane measured at a position (2θ=θ1max) of a diffraction peak intensity P1 where the diffraction intensity is largest in a diffraction intensity peak corresponding to the at least one of the (200) plane and the (002) plane out of diffraction intensity peaks measured by an X-ray diffraction θ-2θ method,
• wherein a maximum difference Δθ1max of the position (2θ=θ1max) in each of the at least one element array in the piezoelectric material of each of the plurality of electromechanical transducer elements is equal to or less than 0.02°.