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US 2017/0291187 A1Published application
Actuation mechanism for accurately controlling distance in ovjp printing
AssigneeUniversal Display Corporation
InventorsPeter van Putten, Sven Pekelder, Mark Meuwese, Maurits Willenbroek, Piet van Rens
Life of this patent
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Abstract
A device for use in OVJP and similar arrangements includes a print head movable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.
Claims18
A device comprising:
- a print head configured to eject an organic material toward a substrate;
- at least one elastic member connecting the print head to a motion frame such that the print head is adjustable in more than a single degree of freedom;
- and
- a first actuator that provides control of the print head in a direction essentially perpendicular to the substrate.
1 more element
A method of operating a deposition apparatus, the method comprising:
- activating the deposition apparatus to cause a print head to eject material toward a substrate;
- receiving data from one or more sensors physically connected to the print head, the data indicating a distance between the print head and the substrate;
- and
- actuating at least one actuator to adjust the distance between the print head and the substrate based upon the data.
1 more element
Dependencies are inferred from the claim text.