# US 2017/0288479 A1 · Magnetic circuits for mems devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0288479 A1 - Document ID: US20170288479A1 - Status: Published application - Kind: A1 - Application number: 15/086,578 - Filed: 2016-03-31 - Published: 2017-10-05 - Earliest claimed: 2016-03-31 - Assignees: Intel Corporation - Applicants: Intel Corporation - Inventors: Konstantin Matyuch; Barak Freedman; Vladimir Malamud; Arnon Hirshberg; Israel Petronius - Web page: https://patentgrep.com/patent/US20170288479A1 ## CPC - H02K 1/17: Stator cores with permanent magnets - B81B 3/0091: {Magnetic properties, e.g. guiding magnetic flux} - B81B 7/02: containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) - G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means} - H02K 11/30: Structural association with control circuits or drive circuits - H02K 15/03: having permanent magnets - H02K 15/12: Impregnating, moulding insulation, heating or drying of windings, stators, rotors or machines - B81B 2201/042: Micromirrors, not used as optical switches - H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53}) - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract An example apparatus for produce magnetic fields includes a base plate comprising a plurality of grooves. The apparatus includes an MEMS device disposed on the base plate. The apparatus further includes a number of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device. ## Claims ### Claim 1 An apparatus for producing magnetic fields, comprising: a base plate comprising a plurality of grooves; a micro-electromechanical system (MEMS) device disposed on the base plate; and a plurality of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the plurality of magnets are to be retained to the base at the plurality of grooves via an adhesive. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein a length of each of the plurality of grooves is to be longer than a width of an associated magnet of the plurality of magnetics to be retained. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the plurality of magnets are disposed substantially flush with the base plate and one or more sides of the MEMS magnetic device. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the plurality of grooves are disposed perpendicular to edges of the MEMS device. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein a form of the plurality of grooves is based on an adhesive used to couple the plurality of magnets to the base plate. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein a depth of the plurality of grooves is based on an adhesive used to couple the plurality of magnets to the base plate. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein the base plate comprises a yoke. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the plurality of grooves comprise low depth grooves. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the base plate comprises a substantially flat surface. ### Claim 11 A method for manufacturing a magnetic circuit for a micro-electromechanical system (MEMS) device, comprising: fabricating a base plate with a plurality of grooves to surround the MEMS device; disposing an adhesive onto a plurality of grooves to retain one or more magnets of the magnetic circuit; and disposing the one or more magnets onto the plurality of grooves. ### Claim 12 (depends on 11) The method of claim 11, wherein the adhesive comprises a UV adhesive. ### Claim 13 (depends on 11) The method of claim 11, wherein a form and a depth of the plurality of grooves is based at least in part on the adhesive. ### Claim 14 (depends on 11) The method of claim 11, wherein disposing the adhesive comprises forcing the adhesive into the plurality of grooves under each of the plurality of magnets via a capillary force after disposing the plurality of magnets onto the plurality of grooves. ### Claim 15 (depends on 11) The method of claim 11, wherein disposing the adhesive further comprises preheating the adhesive to a predetermined temperature. ### Claim 16 (depends on 11) The method of claim 11, wherein disposing the one or more magnets is performed before disposing the adhesive onto the plurality of grooves. ### Claim 17 (depends on 11) The method of claim 11, comprising curing the adhesive to set a placement of the magnets onto the base plate via a dual curing comprising light, heat, chemical reaction, or any combination thereof. ### Claim 18 (depends on 11) The method of claim 11, wherein fabricating the base plate comprises etching the grooves via laser etching, chemical etching, electro-erosion etching, or any combination thereof. ### Claim 19 A system for producing magnetic fields, comprising: a processor; a base plate comprising a plurality of grooves; a micro-electromechanical system (MEMS) device electrically coupled to the processor and disposed on the base plate; and a plurality of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device. ### Claim 20 (depends on 19) The system of claim 19, wherein a length of each of the plurality of grooves is to be longer than a width of an associated magnet of the plurality of magnets and wherein the plurality of grooves are disposed perpendicular to edges of the MEMS device.