# US 2017/0288272 A1 · Laser patterned thin film battery

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2017/0288272 A1
- Document ID: US20170288272A1
- Status: Published application
- Kind: A1
- Application number: 15/508,374
- Filed: 2015-09-04
- Published: 2017-10-05
- Earliest claimed: 2014-09-04
- Applicants: Applied Materials, Inc.
- Inventors: Byung Sung Leo KWAK; Daoying SONG
- Web page: https://patentgrep.com/patent/US20170288272A1

## CPC

- H01M 10/0585: of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
- H01M 4/0421: {involving vapour deposition}
- H01M 6/40: Printed batteries {, e.g. thin film batteries}
- H01M 10/0436: {Small-sized flat cells or batteries for portable equipment}
- H01M 10/052: Li-accumulators
- H01M 10/0562: Solid materials
- H01M 10/4235: {Safety or regulating additives or arrangements in electrodes, separators or electrolyte (H01M10/4242 takes precedence)}
- H01M 4/661: {Metal or alloys, e.g. alloy coatings (H01M4/669 take precedence)}
- H01M 4/70: characterised by shape or form
- Y02E 60/10: Energy storage using batteries
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- H01M: PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

A thin film battery may include a substrate; with a cathode current collector layer an anode current collector layer, a cathode layer, an electrolyte layer, and an anode layer, wherein a portion of an anode contact area of the anode current collector is not covered by the anode layer, and wherein an electrically insulating buffer area in the electrolyte layer, for electrically isolating the laser cut edge of the cathode layer adjacent to the contact area of the cathode current collector from the laser cut edge of the anode layer, is not covered by the anode layer, the electrically insulating buffer area being between the contact area of the cathode current collector layer and the anode layer, Methods and apparatus for forming thin film batteries are also described herein.

## Claims

### Claim 1

A thin film battery, comprising:
a substrate;
a cathode current collector and an anode current collector on said substrate, said cathode current collector and said anode current collector being electrically isolated from each other;
a cathode layer on said cathode current collector, wherein a contact area of said cathode current collector is not covered by said cathode layer;
an electrolyte layer completely covering the top surface of said cathode layer and covering a portion of said anode current collector, wherein the uncovered portion of said anode current collector is a contact area of said anode current collector;
an anode layer on said electrolyte layer and said anode current collector, wherein a portion of said anode contact area of said anode current collector is not covered by said anode layer, and wherein an electrically insulating buffer area in said electrolyte layer, for electrically isolating the edge of said cathode layer adjacent to said contact area of said cathode current collector from the edge of said anode layer, is not covered by said anode layer, said electrically insulating buffer area being between said contact area of said cathode current collector and said anode layer.

### Claim 2 (depends on 1)

The thin film battery of claim 1, wherein said contact area of said cathode current collector is a corner portion of the top surface of said cathode current collector.

### Claim 3 (depends on 1)

The thin film battery of claim 1, wherein said contact area of said anode current collector is a corner portion of the top surface of said anode current collector.

### Claim 4 (depends on 1)

The thin film battery of claim 1, further comprising an initial protection layer, said initial protection layer being on the top surface of said anode layer and covering the complete top surface of said anode layer without extending beyond the edges of the anode layer.

### Claim 5 (depends on 4)

The thin film battery of claim 4, further comprising an encapsulation layer completely covering said initial protection layer, said anode layer, said electrolyte layer, and said cathode layer.

### Claim 6

A method of manufacturing thin film batteries, comprising:
blanket depositing on a substrate a current collector layer and a cathode layer;
laser die patterning said current collector layer and said cathode layer to form a cathode current collector and an anode current collector and laser ablating portions of said cathode layer to reveal a contact area of said cathode current collector and to expose all of said anode current collector, to form a first patterned stack;
blanket depositing an electrolyte layer over said first patterned stack;
laser ablating a portion of said electrolyte layer to expose a contact area of said anode current collector, to form a second patterned stack;
blanket depositing an anode layer and an initial protection layer over said second patterned stack;
laser die patterning said electrolyte, said anode and said initial protection layers within the die pattern of the laser die patterning of said current collector layer and said cathode layer;
laser ablating portions of said initial protection, said anode, and said electrolyte layers to reveal said contact area of said cathode current collector, and laser ablating said initial protection layer, said anode layer and a portion of the thickness of said electrolyte layer to form an electrically insulating buffer area in said electrolyte layer to electrically isolate the laser cut edge of the cathode layer adjacent to said contact area of the cathode current collector from the laser cut edge of the patterned anode, and laser ablating a portion of said initial protection layer and said electrolyte layer to reveal said contact area of said anode current collector, to form a third device stack.

### Claim 7 (depends on 6)

The method of claim 6, wherein said cathode layer is annealed after said laser die patterning of said current collector layer and said cathode layer and said laser ablating of said portions of said cathode layer.

### Claim 8 (depends on 6)

The method of claim 6, further comprising:
blanket depositing an encapsulation layer on said third device stack; and
laser ablating said encapsulation layer to reveal a portion of said contact area of said cathode current collector and a portion of said contact area of said anode current collector, to form a fourth device structure.

### Claim 9 (depends on 8)

The method of claim 8, further comprising:
blanket depositing a second encapsulation layer on said fourth device stack; and
laser ablating said second encapsulation layer to reveal a second portion of said contact area of said cathode current collector and a second portion of said contact area of said anode current collector, wherein said second portion is smaller than said first portion.

### Claim 10 (depends on 6)

The method of claim 6, wherein said laser ablating said electrolyte layer to form said electrically insulating buffer area in said electrolyte layer utilizes a femtosecond UV laser.

### Claim 11

An apparatus for manufacturing thin film batteries on a substrate comprising:
a first system for blanket depositing on a substrate a current collector layer and a cathode layer and laser die patterning said current collector layer and said cathode layer to form a cathode current collector and an anode current collector and laser ablating portions of said cathode layer to reveal a contact area of said cathode current collector and to expose all of said anode current collector, to form a first patterned stack;
a second system for blanket depositing an electrolyte layer over said first patterned stack and laser ablating a portion of said electrolyte layer to expose a contact area of said anode current collector, to form a second patterned stack; and
a third system for blanket depositing an anode layer and an initial protection layer over said second patterned stack, laser die patterning said electrolyte, said anode and said initial protection layers within the die pattern of the laser die patterning of said current collector layer and said cathode layer, laser ablating portions of said initial protection, said anode, and said electrolyte layers to reveal said contact area of said cathode current collector, laser ablating said initial protection layer, said anode layer and a portion of the thickness of said electrolyte layer to form an electrically insulating buffer area in said electrolyte layer to electrically isolate the laser cut edge of the cathode layer adjacent to said contact area of the cathode current collector from the laser cut edge of the patterned anode, and laser ablating a portion of said initial protection layer and said electrolyte layer to reveal said contact area of said anode current collector, to form a third device stack.

### Claim 12 (depends on 11)

The apparatus of claim 11, wherein said first, second and third systems are in-line tools.

### Claim 13 (depends on 11)

The apparatus of claim 11, further comprising a fourth system for annealing said cathode layer after said laser die patterning of said current collector layer and said cathode layer and said laser ablating of said portions of said cathode layer.

### Claim 14 (depends on 11)

The apparatus of claim 11, wherein said third system includes a femtosecond UV laser for laser ablating said electrolyte layer to form said electrically insulating buffer area in said electrolyte layer.

### Claim 15 (depends on 11)

The apparatus of claim 11, further comprising a fifth system for blanket depositing an encapsulation layer on said third device stack and laser ablating said encapsulation layer to reveal a portion of said contact area of said cathode current collector and a portion of said contact area of said anode current collector.