# US 2017/0287771 A1 · Stretching retention plate for electronic assemblies

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- Number: US 2017/0287771 A1
- Document ID: US20170287771A1
- Status: Published application
- Kind: A1
- Application number: 15/089,480
- Filed: 2016-04-02
- Published: 2017-10-05
- Earliest claimed: 2016-04-02
- Assignees: Intel Corporation
- Applicants: Intel Corporation
- Inventors: DANIEL CHAVEZ-CLEMENTE; JOSHUA D. HEPPNER; NAIDA DURANOVIC
- Web page: https://patentgrep.com/patent/US20170287771A1

## CPC

- H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support}
- H10P 72/7606: {characterised by edge clamping, e.g. clamping ring}
- H10P 72/7608: {characterised by a plurality of separate clamping members, e.g. clamping fingers}
- H10W 70/611: {for connecting multiple chips together}
- H10W 70/688: {Flexible insulating substrates}
- H10W 72/0711: {Apparatus therefor}
- H10W 72/07178: {Means for aligning}
- H10W 72/07183: {Means for monitoring}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A substrate retention plate system for holding a substrate for processing in an electronic device manufacturing process is described. The retention plate system includes a top plate and a bottom plate to sandwich a flexible substrate. Additionally, the top plate includes a number of cams to stretch the flexible substrate across the bottom plate.

## Claims

### Claim 1

A retention plate system, comprising:
a bottom plate having a top surface to support a flexible substrate; and
a top plate having a plurality of cams disposed on a bottom surface of the top plate, the cams positioned on the bottom surface to engage both ends of the flexible substrate, and compress each end of the flexible substrate between the cams and the top surface of the bottom plate as a distance between the top plate and the bottom plate decreases.

### Claim 2 (depends on 1)

The retention plate system of claim 1, the cams to increase an amount of tension applied to each end of the flexible substrate in lateral directions away from a center of the flexible substrate as the distance between the top plate and the bottom plate decreases.

### Claim 3 (depends on 2)

The retention plate system of claim 2, the flexible substrate comprising at least one wrinkles, the tension to stretch the flexible substrate to remove the at least one wrinkle from the flexible substrate.

### Claim 4 (depends on 2)

The retention plate system of claim 2, the tension to stretch the flexible substrate into a substantially flat plane parallel to a plane for the top and bottom plates.

### Claim 5 (depends on 4)

The retention plate system of claim 4, at least one of the top plate or the bottom plate comprising an aperture to expose a portion of the stretched flexible substrate.

### Claim 6 (depends on 5)

The retention plate system of claim 5, the bottom plate comprising at least one cross member spanning the aperture to support the flexible substrate.

### Claim 7 (depends on 1)

The retention plate system of claim 1, the bottom plate comprising a plurality of magnets to hold the top plate against the bottom plate.

### Claim 8 (depends on 1)

The retention plate system of claim 1, the plurality of cams a first set of cams, the bottom plate comprising a second set of cams to stretch the flexible substrate across the bottom plate.

### Claim 9 (depends on 1)

The retention plate system of claim 1, the bottom plate comprising a plurality of rollers, the flexible substrate to slide over the rollers to a stretched position.

### Claim 10 (depends on 1)

The retention plate system of claim 1, the plurality of cams comprising a coating to increase a friction between the plurality of cams and the flexible substrate.

### Claim 11 (depends on 1)

The retention plate system of claim 1, the bottom plate comprising a coating to reduce a friction between the bottom plate and the flexible substrate.

### Claim 12

An apparatus to retain a flexible substrate in a stretched state, the apparatus comprising:
a pair of plates to receive a flexible substrate and squeeze the flexible substrate between the pair of plates; and
a set of cams operable coupled to a first one of the pair of plates and positioned opposite a second one of the pair of plates, the cams to stretch the flexible substrate across the second one of the pair of plates as the flexible substrate is squeezed between the pair of plates.

### Claim 13 (depends on 12)

The apparatus of claim 12, at least one plate of the pair of plates comprising an aperture to expose a portion of the flexible substrate.

### Claim 14 (depends on 12)

The apparatus of claim 12, least one plate of the pairs of plates comprising a plurality of magnets to hold the top plate against the bottom plate.

### Claim 15 (depends on 12)

The apparatus of claim 12, the set of cams a first set of cams, the apparatus comprising a second set of cams operably coupled to the second one of the pair of plates opposing the first set of cams.

### Claim 16 (depends on 12)

The apparatus of claim 12, comprising a set of rollers operably coupled to the second one of the pair of plates.

### Claim 17 (depends on 12)

The apparatus of claim 12, each cam of the set of cams comprising a coating to increase a friction between each of the cams and the flexible substrate.

### Claim 18 (depends on 12)

The apparatus of claim 12, the second plate of the pair of plates comprising a coating to reduce a friction between the second plate and the flexible substrate.

### Claim 19

A method comprising:
providing a flexible substrate;
placing the flexible substrate between a top plate and a bottom plate of a retention plate system, the top plate comprising a plurality of cams disposed opposite the bottom plate; and
squeezing the flexible substrate between the top plate and the bottom plate to stretch the flexible substrate between the cams.

### Claim 20 (depends on 19)

The method of claim 19, comprising exposing a stretched portion of the flexible substrate through an aperture of the top plate or the bottom plate to process the flexible substrate in an electronic device manufacturing process.

### Claim 21 (depends on 19)

The method of claim 19, comprising supporting the flexible substrate on a cross member of the bottom plate before squeezing the flexible substrate between the top plate and the bottom plate.

### Claim 22 (depends on 19)

The method of claim 19, comprising holding the top plate in proximity to the bottom via a plurality of magnets.

### Claim 23 (depends on 19)

The method of claim 19, the plurality of cams comprising a coating to increase a friction between the plurality of cams and the flexible substrate.

### Claim 24 (depends on 19)

The method of claim 19, the bottom plate comprising a coating to reduce a friction between the bottom plate and the flexible substrate.
