# US 2017/0287767 A1 · Substrate transfer apparatus, substrate processing apparatus, and substrate processing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0287767 A1 - Document ID: US20170287767A1 - Status: Published application - Kind: A1 - Application number: 15/472,671 - Filed: 2017-03-29 - Published: 2017-10-05 - Earliest claimed: 2016-03-31 - Assignees: Shibaura Mechatronics Corporation - Applicants: Shibaura Mechatronics Corporation - Inventors: Masaaki FURUYA - Web page: https://patentgrep.com/patent/US20170287767A1 ## CPC - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - H10P 72/0456: {in-line arrangement} - H10P 72/0461: {characterised by the presence of two or more transfer chambers} - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/3306: {Horizontal transfer of a single workpiece} - H10P 72/3404: {Storage means} - H10P 72/3411: {involving loading and unloading of wafers} - H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins} - B60K 35/28: characterised by the type of the output information, e.g. video entertainment or vehicle dynamics information; characterised by the purpose of the output information, e.g. for attracting the attention of the driver - B60K 35/29: Instruments characterised by the way in which information is handled, e.g. showing information on plural displays or prioritising information according to driving conditions - B60K 2360/167: Vehicle dynamics information - B60K 2360/182: Distributing information between displays - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B60K: ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES ## Abstract According to one embodiment, a substrate transfer apparatus includes: a first gripping plate; a first claw that is supported by the first gripping plate, and has an abutment surface abutting on the outer peripheral surface of a substrate located above and below a surface of the first gripping plate; a second gripping plate arranged as overlapping with the first gripping plate; a second claw that is supported by the second gripping plate, and has an abutment surface abutting on the outer peripheral surface of the substrate located above and below the surface of the first gripping plate; and a gripping part configured to move the first gripping plate and the second gripping plate relative to each other such that the first claw and the second claw move close to and away from each other in a direction intersecting the outer peripheral surface of the substrate. ## Claims ### Claim 1 A substrate transfer apparatus, comprising: a first gripping plate; a first claw that is supported by the first gripping plate, and has an abutment surface, which abuts on an outer peripheral surface of a substrate, located above and below a surface of the first gripping plate; a second gripping plate arranged as overlapping with the first gripping plate; a second claw that is supported by the second gripping plate, and has an abutment surface, which abuts on the outer peripheral surface of the substrate, located above and below the surface of the first gripping plate; and a gripping part configured to move the first gripping plate and the second gripping plate relative to each other such that the first claw and the second claw move close to and away from each other in a direction intersecting the outer peripheral surface of the substrate. ### Claim 2 (depends on 1) The substrate transfer apparatus of claim 1, wherein the first claw includes: an upper claw that is arranged on an upper surface of the first gripping plate, and has the abutment surface; and a lower claw that is arranged on a lower surface of the first gripping plate, and has the abutment surface. ### Claim 3 (depends on 1) The substrate transfer apparatus of claim 1, further comprising: a lifting part configured to move the gripping part up and down; and a controller configured to control the lifting part to move the gripping part up or down to cause the gripping part to move the first gripping plate and the second gripping plate relative to each other such that the first claw and the second claw are moved from a first height position for gripping a first substrate among a plurality of substrates stacked at predetermined intervals to a second height position for gripping a second substrate located above or below the first substrate. ### Claim 4 (depends on 3) The substrate transfer apparatus of claim 3, further comprising an arm configured to move the gripping part in horizontal direction, wherein the controller is further configured to control the arm to move the gripping part to a first position where the substrate is placed, cause the gripping part located at the first position to move the first gripping plate and the second gripping plate relative to each other in a direction in which the first claw and the second claw move away from each other, control the lifting part to move the gripping part to a second position located below the first position without changing horizontal positions of the first gripping plate and the second gripping plate, and cause the gripping part located at the second position to move the first gripping plate and the second gripping plate relative to each other in a direction in which the first claw and the second claw move close to each other. ### Claim 5 A substrate processing apparatus, comprising: a storage configured to store a plurality of substrates stacked at predetermined intervals; a substrate transfer apparatus configured to transfer the substrates; and a substrate processing unit configured to process the substrates, wherein the substrate transfer apparatus includes: a first gripping plate; a first claw that is supported by the first gripping plate, and has an abutment surface, which abuts on an outer peripheral surface of a substrate, located above and below a surface of the first gripping plate; a second gripping plate arranged as overlapping with the first gripping plate; a second claw that is supported by the second gripping plate, and has an abutment surface, which abuts on the outer peripheral surface of the substrate, located above and below the surface of the first gripping plate; and a gripping part configured to move the first gripping plate and the second gripping plate relative to each other such that the first claw and the second claw move close to and away from each other in a direction intersecting the outer peripheral surface of the substrate. ### Claim 6 (depends on 5) The substrate processing apparatus of claim 5, wherein the first claw includes: an upper claw that is arranged on an upper surface of the first gripping plate, and has the abutment surface; and a lower claw that is arranged on a lower surface of the first gripping plate, and has the abutment surface. ### Claim 7 (depends on 5) The substrate processing apparatus of claim 5, further comprising: a lifting part configured to move the gripping part up and down; and a controller configured to control the lifting part to move the gripping part up or down to cause the gripping part to move the first gripping plate and the second gripping plate relative to each other such that the first claw and the second claw are moved from a first height position for gripping a first substrate among the substrates stacked at predetermined intervals to a second height position for gripping a second substrate located above or below the first substrate. ### Claim 8 (depends on 7) The substrate processing apparatus of claim 7, further comprising an arm configured to move the gripping part in horizontal direction, wherein the controller is further configured to control the arm to move the gripping part to a first position where the substrate is placed, cause the gripping part located at the first position to move the first gripping plate and the second gripping plate relative to each other in a direction in which the first claw and the second claw move away from each other, control the lifting part to move the gripping part to a second position located below the first position without changing horizontal positions of the first gripping plate and the second gripping plate, and cause the gripping part located at the second position to move the first gripping plate and the second gripping plate relative to each other in a direction in which the first claw and the second claw move close to each other. ### Claim 9 (depends on 5) The substrate processing apparatus of claim 5, wherein the substrate processing unit includes: a substrate processing table; a plurality of support members arranged on the substrate processing table to support the substrate from a lower surface thereof; and a substrate lifting part configured to support the substrate from an outer side of the support members, and move the substrate up and down. ### Claim 10 A substrate processing method, comprising: taking a first substrate out from a storage that stores a plurality of substrates stacked at predetermined intervals using a substrate transfer apparatus that includes a first gripping plate, a first claw that is supported by the first gripping plate, and has an abutment surface, which abuts on an outer peripheral surface of a substrate, located above and below a surface of the first gripping plate, a second gripping plate arranged as overlapping with the first gripping plate, a second claw that is supported by the second gripping plate, and has an abutment surface, which abuts on the outer peripheral surface of the substrate, located above and below the surface of the first gripping plate, and a gripping part configured to move the first gripping plate and the second gripping plate relative to each other such that the first claw and the second claw move close to and away from each other in a direction intersecting the outer peripheral surface of the substrate; performing a process on the first substrate taken out from the storage; storing the first substrate subjected to the process in the storage using the substrate transfer apparatus; taking a second substrate located above or below the first substrate stored in the storage out from the storage using the substrate transfer apparatus; performing a process on the second substrate taken out from the storage; and storing the second substrate subjected to the process in the storage using the substrate transfer apparatus.