Reduction of Surface Roughness in Epitaxially Grown Germanium by Controlled Thermal Oxidation

Abstract

Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of germanium. In some embodiments, the surface roughness is further reduced by controlling a rate of the thermal oxidation. In some embodiments, the surface roughness is reduced by thermal annealing.

Dependencies are inferred from the claim text.