# US 2017/0287683 A1 · Aerosol deposition coating for semiconductor chamber components

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- Number: US 2017/0287683 A1
- Document ID: US20170287683A1
- Status: Published application
- Kind: A1
- Application number: 15/620,700
- Filed: 2017-06-12
- Published: 2017-10-05
- Earliest claimed: 2013-05-24
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Jennifer Y. Sun; Biraja Kanungo; Tom Cho; Ying Zhang
- Web page: https://patentgrep.com/patent/US20170287683A1

## CPC

- H01J 37/32807: {Construction (includes replacing parts of the apparatus)}
- C23C 24/04: Impact or kinetic deposition of particles
- H01J 37/3244: {Gas supply means}
- Y10T 428/24413: Metal or metal compound
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

An component of a processing chamber comprises an aerosol deposited coating on the component, the aerosol deposited coating comprising a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle.

## Claims

### Claim at position 1

1-10. (canceled)

### Claim 11

An article comprising:
a body; and
a coating on the body, the coating comprising a first rare earth metal oxide nanoparticle, a second rare earth metal oxide nanoparticle, and a third metal oxide nanoparticle, wherein the coating has a particle crystal structure and wherein:
the article as a component of a processing chamber;
the first rare earth metal oxide is Y2O3 and the coating comprises the Y2O3 in a range of 40 mol % to less than 100 mol %;
the second rare earth metal oxide is ZrO2 and the coating comprises the ZrO2 in a range of greater than 0 mol % to less than 60 mol %; and
the third metal oxide is Al2O3 and the coating comprises the Al2O3 at a range of greater than 0 mol % to 40 mol %.

### Claim 12 (depends on 11)

The article of claim 11, wherein the component body has a surface roughness of less than about 0.2 microinch.

### Claim 13 (depends on 11)

The article of claim 11, wherein the component body comprises Aluminum, quartz, bulk alumina, silicon, bulk Yttria, a bulk ceramic compound of Y4Al2O9 and a solid-solution of Y2O3—ZrO2, plasma sprayed Yttria, or silicon carbide.

### Claim at position 5

14-16. (canceled)

### Claim 17

A component of a processing chamber, the component comprising a coating that was deposited on the component by a process comprising:
loading the component into a deposition chamber;
reducing a pressure of the deposition chamber below atmospheric pressure; and
depositing a coating on the component by spraying an aerosol of ceramic nanoparticles comprising a mixture of a first rare earth metal oxide, a second rare earth metal oxide, and a third metal oxide onto the component at approximately room temperature, wherein the coating has a particle crystal structure and wherein:
the first rare earth metal oxide is Y2O3 and the mixture comprises the Y2O3 in a range of 40 mol % to less than 100 mol %;
the second rare earth metal oxide is ZrO2 and the mixture comprises the ZrO2 in a range of greater than 0 mol % to less than 60 mol %; and
the third metal oxide is Al2O3 and the mixture comprises the Al2O3 at a range of greater than 0 mol % to 40 mol %.

### Claim 18

(canceled)

### Claim 19

(canceled)

### Claim 20 (depends on 17)

The article component of claim 17, wherein the component further comprises a barrier layer that was formed by a process comprising:
heating the component to a temperature in a range from about 1200 degrees C. to about 1600 degrees C. for a time in a range from about 30 minutes to about 6 hours after deposition of the coating, wherein the heating causes the barrier layer to form between the component and the coating.

### Claim 21 (depends on 17)

The component of claim 17, wherein:
the mixture comprises the Y2O3 in a range of 50-75 mol %;
the mixture comprises the ZrO2 in a range of 10-30 mol %; and
the mixture comprises the Al2O3 in a range of 10-30 mol %.

### Claim 22 (depends on 17)

The component of claim 17, wherein:
the mixture comprises the Y2O3 in a range of 40 mol % to less than 100 mol %;
the mixture comprises the ZrO2 in a range of greater than 0 mol % to less than 60 mol %; and
the mixture comprises the Al2O3 in a range of greater than 0 mol % to less than 10 mol %.

### Claim 23 (depends on 17)

The component of claim 17, wherein:
the mixture comprises the Y2O3 in a range of 40-60 mol %;
the mixture comprises the ZrO2 in a range of greater than 30 mol % to 50 mol %; and
the mixture comprises the Al2O3 in a range of 10-20 mol %.

### Claim 24 (depends on 11)

The article of claim 11, wherein:
the coating comprises the Y2O3 in a range of 50-75 mol %;
the coating comprises the ZrO2 in a range of 10-30 mol %; and
the coating comprises the Al2O3 in a range of 10-30 mol %.

### Claim 25 (depends on 11)

The article of claim 11, wherein:
the coating comprises the Y2O3 in a range of 40 mol % to less than 100 mol %;
the coating comprises the ZrO2 in a range of greater than 0 mol % to less than 60 mol %; and
the coating comprises the Al2O3 in a range of greater than 0 mol % to less than 10 mol %.

### Claim 26 (depends on 11)

The article of claim 11, wherein:
the coating comprises the Y2O3 in a range of 40-60 mol %;
the coating comprises the ZrO2 in a range of greater than 30 mol % to 50 mol %; and
the coating comprises the Al2O3 in a range of 10-20 mol %.

### Claim 27 (depends on 11)

The article of claim 11, wherein:
the coating comprises the Y2O3 in a range of 40 mol % to less than 50 mol %;
the coating comprises the ZrO2 in a range of 20-40 mol %; and
the coating comprises the Al2O3 in a range of 20-40 mol %.

### Claim 28 (depends on 11)

The article of claim 11, wherein:
the coating comprises the Y2O3 in a range of greater than 70 mol % to 90 mol %;
the coating comprises the ZrO2 in a range of greater than 0 mol % to 20 mol %; and
the coating comprises the Al2O3 in a range of 10-20 mol %.

### Claim 29 (depends on 11)

The article of claim 11, wherein:
the coating comprises the Y2O3 in a range of 60-80 mol %;
the coating comprises the ZrO2 in a range of greater than 0 mol % to 10 mol %; and
the coating comprises the Al2O3 in a range of 20-40 mol %.

### Claim 30 (depends on 11)

The article of claim 11, wherein:
the coating comprises the Y2O3 in a range of 40-60 mol %;
the coating comprises the ZrO2 in a range of greater than 0 mol % to 20 mol %; and
the coating comprises the Al2O3 in a range of greater than 30 mol % to 40 mol %.

### Claim 31 (depends on 11)

The article of claim 11, further comprising:
an additional coating on the component.

### Claim 32 (depends on 11)

The article of claim 11, wherein the coating is an aerosol deposited coating.

### Claim 33

An article comprising:
a component of a processing chamber; and
a coating on the component, the coating comprising a first rare earth metal oxide nanoparticle and a second metal oxide nanoparticle, wherein the coating has a particle crystal structure and wherein:
the first rare earth metal oxide is Er2O3; and
the second metal oxide is Al2O3.

### Claim 34 (depends on 33)

The article of claim 33, wherein the component has a surface roughness of less than about 0.2 microinch.

### Claim 35 (depends on 33)

The article of claim 33, wherein the coating is an aerosol deposited coating.