# US 2017/0287680 A1 · Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0287680 A1 - Document ID: US20170287680A1 - Status: Published application - Kind: A1 - Application number: 15/628,528 - Filed: 2017-06-20 - Published: 2017-10-05 - Earliest claimed: 2015-07-27 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: Neil Martin Paul Benjamin; Henry Povolny; Anthony J. Ricci - Web page: https://patentgrep.com/patent/US20170287680A1 ## CPC - H01J 37/32082: {Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence)} - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H10P 72/722: {Details of electrostatic chucks} - H10P 74/238: {comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement} - H01J 2237/334: Etching - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A ceramic layer is attached to a top surface of a base plate using a bond layer. The ceramic layer has a top surface configured to support a substrate. At least one clamp electrode is positioned within an upper region of the ceramic layer. A primary radiofrequency (RF) power delivery electrode is positioned within the ceramic layer at a location vertically below the at least one clamp electrode such that a region of the ceramic layer between the primary RF power delivery electrode and the at least one clamp electrode is substantially free of other electrically conductive material. A plurality of RF power delivery connection modules is distributed in a substantially uniform manner about a perimeter of the ceramic layer. Each of the RF power delivery connection modules is configured to form an electrical connection from the base plate to the primary RF power delivery electrode at its respective location. ## Claims ### Claim 1 A ceramic layer for an electrostatic chuck, comprising: a top surface including an area configured to support a substrate; a primary radiofrequency (RF) power delivery electrode positioned within the ceramic layer in an orientation substantially parallel to the top surface; and at least one RF power delivery connection module disposed at least partially within the ceramic layer and configured to provide an electrically conductive path from a location outside the ceramic layer to the primary RF power delivery electrode, the at least one RF power delivery connection module connected to the primary RF power delivery electrode near a radial periphery of the primary RF power delivery electrode, wherein the at least one RF power delivery connection module and the primary RF power delivery electrode together form part of a Faraday cage to direct RF power transmission around an internal volume of the electrostatic chuck. ### Claim 2 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, wherein each of the at least one RF power delivery connection module includes a first electrical connection extending from the location outside the ceramic layer to a conductive segment embedded within the ceramic layer, and wherein each of the at least one RF power delivery connection module includes a second electrical connection extending from the conductive segment embedded within the ceramic layer to the primary RF power delivery electrode. ### Claim 3 (depends on 2) The ceramic layer for the electrostatic chuck as recited in claim 2, wherein the first electrical connection is configured to receive an electrically conductive pin in compression against the conductive segment embedded within the ceramic layer. ### Claim 4 (depends on 2) The ceramic layer for the electrostatic chuck as recited in claim 2, wherein the conductive segment embedded within the ceramic layer to which the first electrical connection extends is a lower conductive segment, the second electrical connection including one or more interior conductive segments embedded within the ceramic layer, the second electrical connection including one or more vertical conductive structures positioned to electrically connect the one or more interior conductive segments to each other and to the lower conductive segment and to the primary RF power delivery electrode. ### Claim 5 (depends on 4) The ceramic layer for the electrostatic chuck as recited in claim 4, wherein at least one of the vertical conductive structures extends through the ceramic layer between the lower conductive segment and one of the interior conductive segments positioned closest to the lower conductive segment, and wherein at least one of the vertical conductive structures extends through the ceramic layer between the primary RF power delivery electrode and one of the interior conductive segments positioned closest to the primary RF power delivery electrode, and wherein at least one of the vertical conductive structures extends through the ceramic layer between each vertically neighboring set of two of the interior conductive segments when present. ### Claim 6 (depends on 4) The ceramic layer for the electrostatic chuck as recited in claim 4, wherein at least four of the vertical conductive structures extend through the ceramic layer between the lower conductive segment and one of the interior conductive segments positioned closest to the lower conductive segment, and wherein at least four of the vertical conductive structures extend through the ceramic layer between the primary RF power delivery electrode and one of the interior conductive segments positioned closest to the primary RF power delivery electrode, and wherein at least four of the vertical conductive structures extend through the ceramic layer between each vertically neighboring set of two of the interior conductive segments when present. ### Claim 7 (depends on 2) The ceramic layer for the electrostatic chuck as recited in claim 2, wherein the at least one RF power delivery connection module includes eight RF power delivery connection modules positioned near a periphery of the ceramic layer, with each of the eight RF power delivery connection modules separated from each adjacent one of the eight RF power delivery connection modules by an angle of about 45 degrees as measured about a centerline of the ceramic layer extending perpendicular to the top surface of the ceramic layer. ### Claim 8 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, wherein the primary RF power delivery electrode is formed as a disc-shaped member. ### Claim 9 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, wherein the ceramic layer is formed as a disc-shaped member. ### Claim 10 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, wherein the primary RF power delivery electrode is sectioned in a radially symmetric manner about a centerline of the ceramic layer extending perpendicular to the top surface of the ceramic layer, with each section of the primary RF power delivery electrode separated from adjacent sections of the primary RF power delivery electrode, and with each section of the primary RF power delivery electrode connected to receive RF power from a respective one of the at least one RF power delivery connection module. ### Claim 11 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, further comprising: a perimeter RF power delivery electrode formed at a vertical location within the ceramic layer below the primary RF power delivery electrode, the perimeter RF power delivery electrode oriented substantially parallel to the primary RF power delivery electrode with a portion of the perimeter RF power delivery electrode overlapped by a portion of the primary RF power delivery electrode. ### Claim 12 (depends on 11) The ceramic layer for the electrostatic chuck as recited in claim 11, wherein each of the at least one RF power delivery connection module includes a first electrical connection extending from the location outside the ceramic layer to a conductive segment embedded within the ceramic layer, and wherein each of the at least one RF power delivery connection module includes a second electrical connection extending from the conductive segment embedded within the ceramic layer to the primary RF power delivery electrode, the second electrical connection including a lower electrical connection extending through the ceramic layer between the conductive segment embedded within the ceramic layer to the perimeter RF power delivery electrode, the second electrical connection also including an upper electrical connection extending through the ceramic layer from the perimeter RF power delivery electrode to the primary RF power delivery electrode. ### Claim 13 (depends on 12) The ceramic layer for the electrostatic chuck as recited in claim 12, further comprising: a central region including the area configured to support the substrate; a peripheral region configured to circumscribe the central region; and a bottom surface that extends in a substantially uniform planar manner across both the central region and the peripheral region, the central region having a first overall thickness as measured perpendicular to the bottom surface, the peripheral region having a second overall thickness as measured perpendicular to the bottom surface, wherein the second overall thickness is less than the first overall thickness, wherein an entirety of the primary RF power delivery electrode is positioned within the central region, and wherein the perimeter RF power delivery electrode is positioned within both a portion of the central region and a portion of the peripheral region. ### Claim 14 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, wherein the ceramic layer is configured to interface with a base plate of the electrostatic chuck. ### Claim 15 (depends on 14) The ceramic layer for the electrostatic chuck as recited in claim 14, wherein the at least one RF power delivery connection module is configured to electrically connect to the base plate when the ceramic layer is interfaced with the base plate. ### Claim 16 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, further comprising: a first voltage sensor connected to measure an electrical voltage on the primary RF power delivery electrode, the first voltage sensor electrically connected to a first voltage sensor terminal at an outer surface of the ceramic layer; a second voltage sensor connected to measure an electrical voltage at a location within the ceramic layer separate from the primary RF power delivery electrode, the second voltage sensor electrically connected to a second voltage sensor terminal at the outer surface of the ceramic layer, wherein signals present at the first voltage sensor terminal and the second voltage sensor terminal are used to determine of an amount of RF current transmission from the primary RF power delivery electrode through the top surface of the ceramic layer when the ceramic layer is installed as part of the electrostatic chuck in an operational state. ### Claim 17 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, further comprising: a clamp electrode positioned within the ceramic layer in an orientation substantially parallel to the top surface, the clamp electrode positioned at a location between the primary RF power delivery electrode and the top surface. ### Claim 18 (depends on 17) The ceramic layer for the electrostatic chuck as recited in claim 17, wherein the clamp electrode includes two separate clamp electrodes configured for bipolar operation in which a differential voltage is applied between the two separate clamp electrodes to generate an electrical field for holding the substrate on the top surface. ### Claim 19 (depends on 1) The ceramic layer for the electrostatic chuck as recited in claim 1, further comprising: a heater positioned within the ceramic layer at a location between the primary RF power delivery electrode and a bottom surface of the ceramic layer. ### Claim 20 A method for manufacturing an electrostatic chuck, comprising: forming a ceramic layer having a top surface including an area configured to support a substrate, wherein forming the ceramic layer includes positioning a primary radiofrequency (RF) power delivery electrode within the ceramic layer in an orientation substantially parallel to the top surface of the ceramic layer; and wherein forming the ceramic layer includes forming at least one RF power delivery connection module within the ceramic layer, the at least one RF power delivery connection module configured to provide an electrically conductive path from a location outside the ceramic layer to the primary RF power delivery electrode, the at least one RF power delivery connection module connected to the primary RF power delivery electrode near a radial periphery of the primary RF power delivery electrode, wherein the at least one RF power delivery connection module and the primary RF power delivery electrode together form part of a Faraday cage to direct RF power transmission around an internal volume of the electrostatic chuck.