Teaching device and teaching method
AssigneeEbara Corporation
InventorHidetatsu ISOKAWA
Life of this patent
Estimating the term…
Abstract
A teaching apparatus is provided with an arm-side position sensor attached to arms, a dummy wafer placed on a stage, a dummy-wafer-side position sensor attached to the dummy wafer, and a signal receiver configured to receive a position signal from the arm-side position sensor to determine a position coordinate of the arm-side position sensor, and receive a position signal from the dummy-wafer-side position sensor to determine a position coordinate of the dummy-wafer-side position sensor. A control part, based on the position coordinate of the dummy-wafer-side position sensor, calculates a position coordinate of the arm-side position sensor when the arms hold the wafer, and moves the arms such that the arm-side position sensor moves to the calculated position coordinate.
Claims12
1-11. (canceled)
A teaching system comprising:
- a stage on which a wafer is placed;
- a pair of openable/closable arms configured to hold the wafer;
- an arm-moving mechanism configured to move the pair of arms with respect to the stage;
- a control part configured to control an operation of the arm-moving mechanism;
- an arm-side position sensor attached to the pair of arms and configured to transmit a position signal;
- a dummy wafer placed on the stage;
- a dummy-wafer-side position sensor attached to the dummy wafer and configured to transmit a position signal;
- and
- a signal receiver configured to receive the position signal from the arm-side position sensor to determine a position coordinate of the arm-side position sensor, and receive the position signal from the dummy-wafer-side position sensor to determine a position coordinate of the dummy-wafer-side position sensor, wherein
- the control part, based on the position coordinate of the dummy-wafer-side position sensor, calculates a position coordinate of the arm-side position sensor when the pair of arms hold the wafer, and controls the operation of the arm-moving mechanism to move the pair of arms such that the arm-side position sensor moves to the calculated position coordinate, while checking the position coordinate, of the arm-side position sensor, that is determined from the position signal of the arm-side position sensor.
A teaching method comprising the steps of:
- receiving a position signal from a dummy-wafer-side position sensor that is attached to a dummy wafer placed on a stage, to determine a position coordinate of the dummy-wafer-side position sensor;
- receiving a position signal from an arm-side position sensor attached to a pair of arms, to determine a position coordinate of the arm-side position sensor;
- based on the position coordinate of the dummy-wafer-side position sensor, calculating a position coordinate of the arm-side position sensor when the pair of arms hold the wafer;
- and
- moving the pair of arms such that the arm-side position sensor moves to the calculated position coordinate.
A cleaning device comprising:
- a stage on which a wafer is placed;
- a cleaning mechanism configured to clean the wafer on the stage;
- a pair of openable/closable arms configured to hold the wafer;
- an arm-moving mechanism configured to move the pair of arms with respect to the stage;
- a control part configured to control an operation of the arm-moving mechanism;
- an arm-side position sensor attached to the pair of arms and configured to transmit a position signal;
- a dummy wafer placed on the stage;
- a dummy-wafer-side position sensor attached to the dummy wafer and configured to transmit a position signal;
- and
- a signal receiver configured to receive the position signal from the arm-side position sensor to determine a position coordinate of the arm-side position sensor, and receive the position signal from the dummy-wafer-side position sensor to determine a position coordinate of the dummy-wafer-side position sensor, wherein
- the control part, based on the position coordinate of the dummy-wafer-side position sensor, calculates a position coordinate of the arm-side position sensor when the pair of arms hold the wafer, and controls the operation of the arm-moving mechanism to move the pair of arms such that the arm-side position sensor moves to the calculated position coordinate.
A non-transitory storage medium configured to store a program, the program causing a computer to execute the steps of:
- receiving a position signal from a dummy-wafer-side position sensor that is attached to a dummy wafer placed on a stage, to determine a position coordinate of the dummy-wafer-side position sensor;
- receiving a position signal from an arm-side position sensor attached to the pair of arms, to determine a position coordinate of the arm-side position sensor;
- based on the position coordinate of the dummy-wafer-side position sensor, calculating a position coordinate of the arm-side position sensor when the pair of arms hold the wafer;
- and
- moving the pair of arms such that the arm-side position sensor moves to the calculated position coordinate.
A maintenance kit comprising:
- an arm-side position sensor attached to a pair of arms and configured to transmit a position signal;
- a dummy wafer placed on a stage;
- a dummy-wafer-side position sensor attached to the dummy wafer and configured to transmit a position signal;
- and
- a signal receiver configured to receive the position signal from the arm-side position sensor to determine a position coordinate of the arm-side position sensor, and receive the position signal from the dummy-wafer-side position sensor to determine a position coordinate of the dummy-wafer-side position sensor.
Dependencies are inferred from the claim text.