# US 2017/0285494 A1 · Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0285494 A1 - Document ID: US20170285494A1 - Status: Published application - Kind: A1 - Application number: 15/477,894 - Filed: 2017-04-03 - Published: 2017-10-05 - Earliest claimed: 2016-04-05 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Kazunori Nakajima; Shigeo Koya - Web page: https://patentgrep.com/patent/US20170285494A1 ## CPC - G03F 7/70925: {Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning} - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details} - H10P 72/3306: {Horizontal transfer of a single workpiece} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A cover member that covers a first surface on an opposite side with respect to a holding surface of a holding portion that holds a substrate, the cover member including a first removing member that removes a foreign substance attached to the first surface, in which the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface. ## Claims ### Claim 1 A cover member that covers a first surface on an opposite side with respect to a holding surface of a holding portion that holds a substrate, the cover member comprising: a first removing member that removes a foreign substance attached to the first surface, wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface. ### Claim 2 (depends on 1) The cover member according to claim 1, further comprising a second removing member on a surface on an opposite side of the surface of the cover member including the first removing member, the second removing member removing a foreign substance attached to a movable moving unit that holds the holding portion. ### Claim 3 (depends on 1) The cover member according to claim 1, further comprising a fixing member that fixes the holding portion to the cover member, the holding portion being fixed in a direction extending along the first surface. ### Claim 4 (depends on 3) The cover member according to claim 3, wherein the fixing member is capable of being attached and detached. ### Claim 5 (depends on 1) The cover member according to claim 1, wherein a material of the cover member includes ceramics. ### Claim 6 (depends on 1) The cover member according to claim 1, wherein a material of the cover member includes either one of silicon carbide, alumina, silicon nitride, and zircon. ### Claim 7 (depends on 1) The cover member according to claim 1, wherein a size of the first surface of the holding portion is a size that covers a circle having a diameter of 300 mm to 310 mm, or 450 mm to 460 mm, and the thickness of the holding portion is 1 mm to 3 mm. ### Claim 8 (depends on 1) The cover member according to claim 1, wherein the first removing member includes an adhesive. ### Claim 9 (depends on 1) The cover member according to claim 1, wherein the first removing member includes a plurality of protrusions. ### Claim 10 (depends on 1) The cover member according to claim 1 wherein the first removing member includes an annular protrusion. ### Claim 11 (depends on 2) The cover member according to claim 2 wherein the second removing member includes an adhesive. ### Claim 12 (depends on 2) The cover member according to claim 2, wherein the second removing member includes a plurality of protrusions. ### Claim 13 (depends on 2) The cover member according to claim 2 wherein the second removing member includes an annular protrusion. ### Claim 14 A conveying apparatus that conveys a holding portion that includes a holding surface that holds a substrate, the conveying apparatus comprising: a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an opposite side with respect to the holding surface of the holding portion; and an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member, wherein the cover member comprises a first removing member that removes a foreign substance attached to the first surface, wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface, wherein the conveying portion conveys the holding portion and the cover member to 1a movable moving unit that holds the holding portion while having the first surface and the first removing member of the cover member be in contact with each other, wherein the conveying portion conveys the cover member from the moving unit, and wherein the attaching and detaching portion conveys the holding portion to the moving unit. ### Claim 15 (depends on 14) The conveying apparatus according to claim 14, wherein the cover member includes a second removing member that is on a surface on an opposite side of the surface of the cover member including the first removing member and that removes a foreign substance attached to the moving unit, and the second removing member includes an adhesive, and wherein the attaching and detaching portion removes the foreign substance by having the second removing member of the cover member come into contact with and become separated from the moving unit. ### Claim 16 (depends on 14) The conveying apparatus according to claim 14, wherein the cover member includes a second removing member that is on a surface on the opposite side of the surface of the cover member including the first removing member and that removes a foreign substance attached to the moving unit, and the second removing member includes a plurality of protrusions, and wherein while having the second removing member of the cover member be in contact with the moving unit, the attaching and detaching portion slides the cover member in a direction extending along contact surfaces of the second removing member and the moving unit to remove the foreign substance on the front surface of the moving unit. ### Claim 17 A conveying apparatus that conveys a holding portion that includes a holding surface that holds a substrate, the conveying apparatus comprising: a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an. opposite side with respect to the holding surface of the holding portion; and an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member, wherein the attaching and detaching portion dismounts the holding portion from a movable moving unit that holds the holding portion, wherein the conveying portion conveys the cover member to the moving unit, wherein the attaching and detaching portion attaches the holding portion to the cover member, wherein the conveying portion conveys the holding portion and the cover member from the moving unit, and wherein the cover member includes a first removing member that removes a foreign substance attached to the first surface, and is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface. ### Claim 18 A lithography apparatus comprising: a movable moving unit that holds a holding portion that includes a holding surface that holds a substrate; and a conveying apparatus that conveys the holding portion, wherein the conveying apparatus includes a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an opposite side with respect to the holding surface of the holding portion; and an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member, wherein the cover member comprises a first removing member that removes a foreign substance attached to the first surface, wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface, wherein the conveying portion conveys the holding portion and the cover member to a movable moving unit that holds the holding portion while having the first surface and the first removing member of the cover member be in contact with each other, wherein the conveying portion conveys the cover member from the moving unit, and wherein the attaching and detaching portion conveys the holding portion to the moving unit. ### Claim 19 A method of manufacturing an article, the method comprising: forming a pattern on a substrate by using a lithography apparatus; and treating the substrate on which a pattern has been formed in the forming step, wherein the article is manufactured from the substrate that has been treated, wherein the lithography apparatus includes, a movable moving unit that holds a holding portion that includes a holding surface that holds the substrate, and a conveying apparatus that conveys the holding portion, wherein the conveying apparatus includes, a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an opposite side with respect to the holding surface of the holding portion; and an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member, wherein the cover member comprises a first removing member that removes a foreign substance attached to the first surface, wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface, wherein the conveying portion conveys the holding portion and the cover member to a movable moving unit that holds the holding portion while having the first surface and the first removing member of the cover member be in contact with each other, wherein the conveying portion conveys the cover member from the moving unit, and wherein the attaching and detaching port on conveys the holding portion to the moving unit.