# US 2017/0285491 A1 · Lithography apparatus, control method therefor, and method of manufacturing article

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- Number: US 2017/0285491 A1
- Document ID: US20170285491A1
- Status: Published application
- Kind: A1
- Application number: 15/472,403
- Filed: 2017-03-29
- Published: 2017-10-05
- Earliest claimed: 2016-03-30
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Atsushi Takagi
- Web page: https://patentgrep.com/patent/US20170285491A1

## CPC

- G03F 9/7011: {Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder}
- G03F 7/70625: {Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness}
- G03F 7/70725: {control}
- G03F 9/7015: {Reference, i.e. alignment of original or workpiece with respect to a reference not on the original or workpiece}
- H10P 72/57: {Mask-wafer alignment}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A lithography apparatus includes an original holder configured to hold and move an original, a measurement unit configured to measure a misalignment amount of the original with respect to the original holder, and a controller configured to control movement of the original holder. The controller repeatedly performs preliminary driving for moving the original holder before performing the pattern formation. At this time, if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed, the controller ends the preliminary driving.

## Claims

### Claim 1

A lithography apparatus for performing pattern formation by transferring a pattern of an original onto a substrate, comprising:
an original holder configured to hold and move the original;
a measurement unit configured to measure a misalignment amount of the original with respect to the original holder; and
a controller configured to control movement of the original holder,
wherein the controller repeatedly performs preliminary driving for moving the original holder before performing the pattern formation, and controls the movement of the original holder so as to end the preliminary driving if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed.

### Claim 2 (depends on 1)

The apparatus according to claim 1, wherein the controller repeats a set of an operation of executing the preliminary driving a plurality of times and an operation of determining, after processing of executing the preliminary driving the plurality of times is completed, whether the misalignment amount measured by the measurement unit has converged to the predetermined convergence value.

### Claim 3 (depends on 2)

The apparatus according to claim 2, wherein if the misalignment amount measured by the measurement unit does not converge to the predetermined convergence value while the set is repeatedly executed a predetermined number of times, the controller outputs an error.

### Claim 4 (depends on 1)

The apparatus according to claim 1, wherein if the original is mounted on the original holder for the first time, the controller repeatedly executes the preliminary driving a predetermined number of times enough for the misalignment amount to converge to the predetermined convergence value, and then sets, as the predetermined convergence value, the misalignment amount measured by the measurement unit.

### Claim 5 (depends on 1)

The apparatus according to claim 1, wherein the lithography apparatus comprises an exposure apparatus configured to expose the substrate via the original and a projection optical system.

### Claim 6 (depends on 5)

The apparatus according to claim 5, wherein
the exposure apparatus comprises a scanning exposure apparatus configured to expose the substrate by scanning the original and the substrate with respect to the projection optical system, and
the preliminary driving comprises preliminary scan driving for causing the original holder to reciprocate within a moving range of the original holder at the time of scanning exposure.

### Claim 7 (depends on 1)

The apparatus according to claim 1, wherein the lithography apparatus comprises an imprint apparatus configured to perform the pattern formation by bringing the original into contact with an imprint material on the substrate.

### Claim 8

A lithography apparatus for performing pattern formation on a substrate, comprising:
a substrate holder configured to hold and move the substrate;
a measurement unit configured to measure a misalignment amount of the substrate with respect to the substrate holder; and
a controller configured to control movement of the substrate holder,
wherein the controller repeatedly performs preliminary driving for moving the substrate holder before performing the pattern formation, and controls the movement of the substrate holder so as to end the preliminary driving if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed.

### Claim 9

A control method for a lithography apparatus for performing pattern formation by transferring a pattern of an original held by an original holder onto a substrate, comprising:
repeatedly performing preliminary driving for moving the original holder before performing the pattern formation;
measuring a misalignment amount of the original with respect to the original holder while the preliminary driving is repeatedly performed; and
ending the preliminary driving if the measured misalignment amount converges to a predetermined convergence value.

### Claim 10

A control method for a lithography apparatus for performing pattern formation on a substrate held by a substrate holder, comprising:
repeatedly performing preliminary driving for moving the substrate holder before performing the pattern formation;
measuring a misalignment amount of the substrate with respect to the substrate holder while the preliminary driving is repeatedly performed; and
ending the preliminary driving if the measured misalignment amount converges to a predetermined convergence value.

### Claim 11

A method of manufacturing an article, comprising:
performing pattern formation by transferring a pattern of an original onto a substrate using a lithography apparatus;
processing the substrate on which the pattern has been formed in the performing; and
manufacturing the article from the processed substrate,
wherein the lithography apparatus includes
an original holder configured to hold and move the original,
a measurement unit configured to measure a misalignment amount of the original with respect to the original holder, and
a controller configured to control movement of the original holder, and
the controller repeatedly performs preliminary driving for moving the original holder before performing the pattern formation, and controls the movement of the original holder so as to end the preliminary driving if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed.

### Claim 12

A method of manufacturing an article, comprising:
performing pattern formation by transferring a pattern of an original onto a substrate using a lithography apparatus;
processing the substrate on which the pattern has been formed in the performing; and
manufacturing the article from the processed substrate,
wherein the lithography apparatus includes
a substrate holder configured to hold and move the substrate,
a measurement unit configured to measure a misalignment amount of the substrate with respect to the substrate holder, and
a controller configured to control movement of the substrate holder, and
the controller repeatedly performs preliminary driving for moving the substrate holder before performing the pattern formation, and controls the movement of the substrate holder so as to end the preliminary driving if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed.