# US 2017/0285484 A1 · Mask protection device, exposure apparatus, and method for manufacturing device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0285484 A1 - Document ID: US20170285484A1 - Status: Published application - Kind: A1 - Application number: 15/626,475 - Filed: 2017-06-19 - Published: 2017-10-05 - Earliest claimed: 2014-12-02 - Assignees: Nikon Corporation - Applicants: Nikon Corporation - Inventors: Kazuya OTA - Web page: https://patentgrep.com/patent/US20170285484A1 ## CPC - G03F 7/70058: {Mask illumination systems} - G02B 27/0006: {with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B)} - G03F 1/66: Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof - G03F 7/70741: {Handling masks outside exposure position, e.g. reticle libraries} - G03F 7/7075: {Handling workpieces outside exposure position, e.g. SMIF box} - G03F 7/70916: {Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps} - H10P 72/3218: {Conveying cassettes, containers or carriers} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A reticle protection device capable of keeping a reticle therein is provided with an inner pod capable of keeping the reticle therein; an outer pod capable of keeping the inner pod therein; an electroconductive movable contact portion provided on at least one of the inner pod and the outer pod and being capable of coining into contact with an electroconductive film of the reticle; and a leaf spring for achieving electric conduction of the contact portion to at least one of the inner pod and the outer pod. The reticle is kept in the inner pod and the inner pod is kept in the outer pod, thereby enabling stable grounding of the reticle. ## Claims ### Claim 1 A mask protection device capable of keeping a mask therein, comprising: a housing container capable of keeping the mask therein; an electroconductive contact portion capable of coining into contact with an electroconductive film of the mask; and an electric conduction member for achieving electric conduction of the mask and an outside of the housing container. ### Claim 2 (depends on 1) The mask protection device according to claim 1, wherein the contact portion has an electroconductive resin portion. ### Claim 3 (depends on 1) The mask protection device according to claim 1, wherein the electroconductive film is provided on a pattern surface of the mask and a back surface with respect to the pattern surface, the contact portion includes: a first contact portion capable of coining into contact with the pattern surface; and a second contact portion capable of coining into contact with the back surface. ### Claim 4 (depends on 1) The mask protection device according to claim 1, wherein the electric conduction member has a biasing portion configured to exert biasing force between the contact portion and the electroconductive film. ### Claim 5 (depends on 4) The mask protection device according to claim 4, wherein the housing container includes: a first housing container capable of keeping the mask therein; and a second housing container capable of keeping the first housing container therein, the electric conduction member includes an electroconductive connection member which connects the contact portion to the first housing container, and the second housing container has a second electric conduction member which achieves electric conduction between the first housing container and at least a partial region of an outer surface of the second housing container. ### Claim 6 (depends on 5) The mask protection device according to claim 5, wherein the connection member also serves as the biasing member. ### Claim 7 (depends on 5) The mask protection device according to claim 5, wherein the biasing force is generated when the second housing container keeps the first housing container therein. ### Claim 8 (depends on 5) The mask protection device according to claim 5, wherein the biasing portion is provided in the second housing container. ### Claim 9 (depends on 5) The mask protection device according to claim 5, wherein the electric conduction member further has a displacing device which moves the contact portion to bring the contact portion into contact with the electroconductive film when a pressure around the first housing container becomes higher than a predetermined value, and which moves the contact portion away from the electroconductive film when the pressure around the first housing container becomes lower than the predetermined value. ### Claim 10 (depends on 5) The mask protection device according to claim 5, wherein the second housing container includes: a first member on which the first housing container is mounted; and a second member mounted on the first member to cover the first housing container mounted on the first member, and the electric conduction member further has a displacing device which moves the contact portion to bring the contact portion into contact with the electroconductive film when the first housing container keeping the mask therein is mounted on the first member, and which moves the contact portion away from the electroconductive film when the first member and the second member are separated from each other. ### Claim 11 (depends on 10) The mask protection device according to claim 10, wherein the displacing device moves the contact portion away from the electroconductive film by change of relative position between the first member and the second member. ### Claim 12 (depends on 9) The mask protection device according to claim 9, wherein the biasing portion exerts biasing force between the contact portion and the electroconductive film, using movement by a displacing device. ### Claim 13 (depends on 1) An exposure apparatus for illuminating a pattern with an exposure beam to expose an object with the exposure beam via the pattern and via a projection optical system, the exposure apparatus comprising a mask stage capable of gripping to hold a mask taken out of the mask protection device as set forth in claim 1. ### Claim 14 (depends on 1) An exposure apparatus for illuminating a pattern with an exposure beam to expose an object with the exposure beam via the pattern and via a projection optical system, the exposure apparatus comprising: a mask stage capable of gripping to hold a mask taken out of the mask protection device as set forth in claim 1; an electroconductive member capable of coining into contact with an electroconductive film of the mask; and a ground member which grounds the electroconductive member. ### Claim 15 (depends on 13) The exposure apparatus according to claim 13, wherein the exposure beam is EUV light. ### Claim 16 (depends on 13) A method for manufacturing a device, comprising: forming a pattern on an object with use of the exposure apparatus as set forth in claim 13; and processing the object on which the pattern has been formed. ### Claim 17 (depends on 1) A carrying device for a mask, comprising: a mounting portion on which the mask protection device as set forth in claim 1 is mounted; and a ground member which grounds the mounting portion. ### Claim 18 An exposure apparatus for illuminating a pattern with an exposure beam to expose an object with the exposure beam via the pattern and via a projection optical system, while moving the object, comprising: a mask stage capable of gripping to hold a mask; an electroconductive movable member capable of coining into contact with an electroconductive film of the mask; and an electric conduction member which grounds the movable member.