# US 2017/0285397 A1 · Method of manufacturing electro-optical device, electro-optical device, and electronic apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0285397 A1 - Document ID: US20170285397A1 - Status: Published application - Kind: A1 - Application number: 15/474,448 - Filed: 2017-03-30 - Published: 2017-10-05 - Earliest claimed: 2016-04-04 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Toru NIMURA - Web page: https://patentgrep.com/patent/US20170285397A1 ## CPC - G02F 1/133526: {Lenses, e.g. microlenses or Fresnel lenses} - G02F 1/134309: {characterised by their geometrical arrangement} - G02F 1/13439: {characterised by their electrical, optical, physical properties; materials therefor; method of making} - G02F 1/136213: {Storage capacitors associated with the pixel electrode} - G02F 1/1368: in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)} - G02F 1/133302: {Rigid substrates, e.g. inorganic substrates} - G02F 1/133567: {on the back side} - G02F 2201/121: common or background - G02F 2201/123: pixel - G02F 2203/01: transmissive - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract In a step of forming an element substrate of an electro-optical device, a layered structure, which includes a plurality of films having a film that forms pixel switching elements and a film that forms holding capacitors, is formed on one surface of the substrate, and, thereafter, a lens surface and a lens layer are formed on a second surface of the layered structure. Subsequently, after the substrate is removed by polishing and etching, pixel electrodes are formed on a side of a first substrate, on which the substrate is located, of the layered structure. Therefore, the holding capacitors are provided on a side opposite to a side of the pixel electrodes (side of a counter substrate) for the pixel switching elements. ## Claims ### Claim 1 A method of manufacturing an electro-optical device including an element substrate, on which pixel electrodes, pixel switching elements electrically connected to the pixel electrodes, and holding capacitors electrically connected to the pixel electrode are provided, a counter substrate on which common electrodes that face the pixel electrodes are provided, and an electro-optical layer which is provided between the element substrate and the counter substrate, the method comprising: forming the element substrate including forming a layered structure, which includes a plurality of films having a film that forms the pixel switching elements and a film that forms the holding capacitors, on one surface of the substrate; removing the substrate from another surface of the substrate after the forming of the layered structure; forming the pixel electrodes on a first surface of the layered structure which is a surface on a side, which is opposite to the holding capacitors, of the pixel switching elements, after the removing of the substrate; and providing a first lens surface, which includes a concave surface or a convex surface, and a first light-transmitting lens layer, which covers the first lens surface, on a second surface, on which the holding capacitors are located for the pixel switching elements, of the layered structure after the forming of the layered structure is performed. ### Claim 2 (depends on 1) The method of manufacturing an electro-optical device according to claim 1, wherein the removing of the substrate includes completely removing the substrate. ### Claim 3 (depends on 2) The method of manufacturing an electro-optical device according to claim 2, wherein the forming of the element substrate includes forming the layered structure after forming an etching stopper layer on the one surface of the substrate, and wherein the removing of the substrate includes etching the substrate to remove the substrate until reaching at least the etching stopper layer, and removing the etching stopper layer after the etching of the substrate. ### Claim 4 (depends on 1) The method of manufacturing an electro-optical device according to claim 1, wherein the substrate is a light-transmitting substrate, and wherein the removing of the substrate includes thinning the substrate and remaining a part of the substrate in a thickness direction. ### Claim 5 (depends on 1) The method of manufacturing an electro-optical device according to claim 1, further comprising: pasting a lens array substrate, which includes the first lens surface and the first lens layer, to the second surface of the layered structure by an adhesive layer in the providing of the first lens surface and the first lens layer after the forming of the layered structure and before the removing of the substrate; and performing the removing of the substrate and the forming of the pixel electrodes in a state in which the lens array substrate is pasted to the second surface of the layered structure. ### Claim 6 (depends on 1) The method of manufacturing an electro-optical device according to claim 1, further comprising: forming a light-transmitting film on the second surface of the layered structure, and, thereafter, forming the first lens surface on the light-transmitting film in the providing of the first lens surface and the first lens layer after the forming of the layered structure and before the removing of the substrate; and performing the removing of the substrate and the forming of the pixel electrodes in a state in which the support substrate is pasted to the second surface of the layered structure by an adhesive layer. ### Claim 7 (depends on 6) The method of manufacturing an electro-optical device according to claim 6, wherein the support substrate is a light-transmitting substrate, and wherein the support substrate remains in the electro-optical device. ### Claim 8 (depends on 7) The method of manufacturing an electro-optical device according to claim 7, wherein the support substrate is a crystal substrate or a sapphire substrate. ### Claim 9 (depends on 1) The method of manufacturing an electro-optical device according to claim 1, further comprising: forming a connection section, which electrically connects the pixel switching elements to the pixel electrodes, on the first surface of the layered structure after the removing of the substrate and before the forming of the pixel electrodes. ### Claim 10 (depends on 1) The method of manufacturing an electro-optical device according to claim 1, further comprising: forming a connection section, which electrically connects the pixel switching elements to the pixel electrodes, on one surface of the substrate in the forming of the layered structure. ### Claim 11 An electro-optical device comprising: an element substrate, on which pixel electrodes, pixel switching elements electrically connected to the pixel electrodes, and holding capacitors electrically connected to the pixel electrode are provided; a counter substrate on which common electrodes that face the pixel electrodes are provided; and an electro-optical layer which is provided between the element substrate and the counter substrate, wherein the element substrate includes a layered structure, which includes a plurality of films having a film that forms the pixel switching elements and a film that forms the holding capacitors, a first lens surface, which includes a concave surface or a convex surface that overlaps the pixel electrodes, on a side, which is opposite to the counter substrate, of the layered structure, and a first light-transmitting lens layer which covers the first lens surface from a side opposite to the layered structure, wherein the holding capacitors are provided on a side opposite to the counter substrate for the pixel switching elements, and wherein the pixel electrodes are provided on the counter substrate side of the layered structure. ### Claim 12 (depends on 11) The electro-optical device according to claim 11, wherein the pixel electrodes are laminated on a surface of the layered structure on the counter substrate side, and wherein a substrate is not provided between the pixel electrodes and the layered structure. ### Claim 13 (depends on 11) The electro-optical device according to claim 11, wherein the element substrate includes a light-transmitting substrate between the pixel electrodes and the layered structure, wherein the layered structure is laminated on a surface of the substrate on a side opposite to the counter substrate, and wherein the pixel electrodes are laminated on a surface of the substrate on the counter substrate side. ### Claim 14 (depends on 11) The electro-optical device according to claim 11, wherein the element substrate includes a lens array substrate which has the first lens surface and the first lens layer, and wherein the lens array substrate is pasted to a surface of the layered structure on a side opposite to the counter substrate by an adhesive layer. ### Claim 15 (depends on 11) The electro-optical device according to claim 11, wherein the element substrate includes a light-transmitting film, in which the first lens surface is formed, on a side, which is opposite to the counter substrate, of the layered structure. ### Claim 16 (depends on 15) The electro-optical device according to claim 15, wherein the element substrate includes a light-transmitting support substrate on a side, which is opposite to the layered structure, of the light-transmitting film. ### Claim 17 (depends on 16) The electro-optical device according to claim 16, wherein the support substrate is a crystal substrate or a sapphire substrate. ### Claim 18 (depends on 11) The electro-optical device according to claim 11, wherein the counter substrate is provided with a second lens surface, which includes a concave surface or a convex surface that overlaps the pixel electrodes, and a second light-transmitting lens layer which covers the second lens surface. ### Claim 19 (depends on 11) An electronic apparatus comprising the electro-optical device according to claim 11. ### Claim 20 (depends on 19) The electronic apparatus according to claim 19, further comprising: a light source section that causes light to be incident to the element substrate side for the electro-optical device.