# US 2017/0285331 A1 · Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0285331 A1 - Document ID: US20170285331A1 - Status: Published application - Kind: A1 - Application number: 15/472,659 - Filed: 2017-03-29 - Published: 2017-10-05 - Earliest claimed: 2016-03-31 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Takafumi Miyaharu; Ken-ichiro Shinoda; Takahiro Matsumoto; Kazuhiro Sato - Web page: https://patentgrep.com/patent/US20170285331A1 ## CPC - G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)} - G02B 3/0006: {Arrays (G02B3/02, G02B5/188 take precedence)} - G02B 27/0025: {for optical correction, e.g. distorsion, aberration} - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - H04N 9/3114: {by using a sequential colour filter producing one colour at a time} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract The present invention provides an illumination apparatus which performs oblique illumination, the apparatus including a first optical element formed with an array of a plurality of optical components each configured to generate a point light source, and a second optical element configured to receive light from the first optical element and form an illumination region, with a power thereof in one direction being different from a power thereof in a direction perpendicular to the one direction, wherein at least one of the first optical element and the second optical element has a rotation angle about an optical axis thereof so as to perform compensate for distortion of the illumination region by the oblique illumination. ## Claims ### Claim 1 An illumination apparatus which performs oblique illumination, the apparatus comprising: a first optical element formed with an array of a plurality of optical components each configured to generate a point light source; and a second optical element configured to receive light from the first optical element and form an illumination region, with a power thereof in one direction being different from a power thereof in a direction perpendicular to the one direction, wherein at least one of the first optical element and the second optical element has a rotation angle about an optical axis thereof so as to perform compensate for distortion of the illumination region by the oblique illumination. ### Claim 2 (depends on 1) The apparatus according to claim 1, wherein the illumination region is caused to have a rectangular shape by the compensation. ### Claim 3 (depends on 1) The apparatus according to claim 1, wherein the rotation angle of the first optical element is different from the rotation angle of the second optical element. ### Claim 4 (depends on 3) The apparatus according to claim 3, wherein a shape of the illumination region is closer to a rectangle than that in a case where the rotation angle of the first optical element is equal to the rotation angle of the second optical element. ### Claim 5 (depends on 2) The apparatus according to claim 2, wherein the optical axis has an azimuth of 45° relative to one side of the rectangle and an elevation angle of 24° relative to a normal to a plane to be illuminated. ### Claim 6 (depends on 1) The apparatus according to claim 1, wherein a plane to be illuminated is a Fourier transform plane with respect to an exit plane of the first optical element. ### Claim 7 (depends on 1) The apparatus according to claim 1, wherein the first optical element has 2.8° as the rotation angle, and the second optical element has 77.2° as the rotation angle. ### Claim 8 (depends on 1) The apparatus according to claim 1, wherein the array comprises a microlens array. ### Claim 9 (depends on 1) The apparatus according to claim 1, wherein the second optical element comprises at least one of a cylindrical lens, an anamorphic lens, and a toric lens. ### Claim 10 (depends on 1) An optical apparatus comprising: a mirror array formed with an array of a plurality of mirrors each having a drive axis, an arranging direction of the plurality of mirrors being different from a direction of the drive axis; and an illumination apparatus defined in claim 1 and configured to illuminate the mirror array. ### Claim 11 (depends on 1) An imprint apparatus which molds an imprint material on a substrate to form a pattern on the substrate, the apparatus comprising: a heating device configured to heat the substrate by illuminating the substrate to deform the substrate, wherein the heating device includes an illumination apparatus defined in claim 1 and is configured to heat the substrate by illuminating the substrate via the illumination apparatus. ### Claim 12 (depends on 1) An imprint apparatus which molds an imprint material on a substrate to form a pattern on the substrate, the apparatus comprising: a heating device configured to heat the substrate by illuminating the substrate to deform the substrate, wherein the heating device includes an optical apparatus and is configured to heat the substrate by illuminating the substrate via the optical apparatus, wherein the optical apparatus includes a mirror array formed with an array of a plurality of mirrors each having a drive axis, an arranging direction of the plurality of mirrors being different from a direction of the drive axis, and an illumination apparatus defined in claim 1 and configured to illuminate the mirror array. ### Claim 13 (depends on 1) A projection apparatus comprising: a projection device configured to project an image, wherein the projection device includes an illumination apparatus defined in claim 1 and is configured to project the image via the illumination apparatus. ### Claim 14 A method of manufacturing an article, the method comprising steps of: forming a pattern on a substrate using an imprint apparatus; and processing the substrate, on which the pattern has been formed, to manufacture the article, wherein the imprint apparatus molds an imprint material on the substrate to form a pattern on the substrate, and includes: a heating device configured to heat the substrate by illuminating the substrate to deform the substrate, wherein the heating device includes an illumination apparatus and is configured to heat the substrate by illuminating the substrate via the illumination apparatus, wherein the illumination apparatus performs oblique illumination and includes: a first optical element formed with an array of a plurality of optical components each configured to generate a point light source; and a second optical element configured to receive light from the first optical element and form an illumination region, with a power thereof in one direction being different from a power thereof in a direction perpendicular to the one direction, wherein at least one of the first optical element and the second optical element has a rotation angle about an optical axis thereof so as to perform compensate for distortion of the illumination region by the oblique illumination.