# US 2017/0284791 A1 · Detection Device and Detection Method

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- Number: US 2017/0284791 A1
- Document ID: US20170284791A1
- Status: Published application
- Kind: A1
- Application number: 15/627,948
- Filed: 2017-06-20
- Published: 2017-10-05
- Earliest claimed: 2015-01-22
- Assignees: Boe Technology Group Co., Ltd.; Hefei Boe Optoelectronics Technology Co., Ltd.
- Applicants: Boe Technology Group Co., Ltd.; Hefei Boe Optoelectronics Technology Co., Ltd.
- Inventors: Yangkun JING; Changjun JIANG
- Web page: https://patentgrep.com/patent/US20170284791A1

## CPC

- G01B 11/0675: {using interferometry}
- G01B 9/0203: {With imaging systems}
- G01B 11/0616: {of coating}
- G01B 9/02016: {contacting two or more objects}
- G01J 2009/0238: {the pattern being processed optically, e.g. by Fourier transformation}
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

The present invention provides a detection device and a detection method. The detection device comprises a light source module, a receiving module, an image generation module and a judgment module. The light source module is configured to emit light towards a film at a predetermined angle, the receiving module is configured to receive interference light formed by first reflected light reflected by an upper surface of the film and second reflected light reflected by a lower surface of the film, the image generation module is configured to generate an equal thickness interference fringe image according to the interference light, and the judgment module is configured to judge whether thickness of the film is uniform according to the equal thickness interference fringe image. The detection device can perform high accuracy detection on uniformity of the thickness of a film, thereby facilitating improving display quality of a display panel.

## Claims

### Claim 1

A detection device, comprising a light source module, a receiving module which is a sensor or a charge coupled device, an image generation module which is a camera and a judgment module which is a comparator, wherein the image generation module is connected to the receiving module and the judgment module, respectively;
the light source module is configured to emit light towards a film at a predetermined angle;
the receiving module is configured to receive interference light formed by first reflected light reflected by an upper surface of the film and second reflected light reflected by a lower surface of the film;
the image generation module is configured to generate an equal thickness interference fringe image according to the interference light; and
the judgment module is configured to judge whether thickness of the film is uniform according to the equal thickness interference fringe image.

### Claim 2 (depends on 1)

The detection device according to claim 1, further comprising a correction module which is a corrector, wherein the correction module is connected to the image generation module and the judgment module, respectively;
the correction module is configured to correct the equal thickness interference fringe image according to a predetermined sensitivity, the predetermined sensitivity being a ratio of a variation in reflectivity of the film to a variation in thickness of the film; and
the judgment module is configured to judge whether the thickness of the film is uniform according to the corrected equal thickness interference fringe image.

### Claim 3 (depends on 2)

The detection device according to claim 2, further comprising a storage module which is a memory, wherein the storage module is connected to the correction module; and
the storage module is configured to store information about the predetermined sensitivity.

### Claim 4 (depends on 1)

The detection device according to claim 1, further comprising a contrast enhancement module which is a contrast enhancer, wherein the contrast enhancement module is connected to the image generation module and the judgment module, respectively;
the contrast enhancement module is configured to enhance contrast of the equal thickness interference fringe image; and
the judgment module is configured to judge whether the thickness of the film is uniform according to the equal thickness interference fringe image having enhanced contrast.

### Claim 5 (depends on 1)

The detection device according to claim 1, further comprising a conversion module which is an analog-to-digital converter, wherein the conversion module is connected to the image generation module and the judgment module, respectively;
the conversion module is configured to convert the equal thickness interference fringe image into digital signals in a case where the equal thickness interference fringe image comprises an analog signal; and
the judgment module is configured to compare the digital signals of the equal thickness interference fringe image with digital signals of a standard equal thickness interference fringe image, so as to judge whether the thickness of the film is uniform.

### Claim 6 (depends on 1)

The detection device according to claim 1, further comprising a filter processing module which is a filter, wherein the filter processing module is connected to the receiving module and the image generation module, respectively;
the filter processing module is configured to filter interference light beyond a predetermined frequency range; and
the image generation module is configured to generate an equal thickness interference fringe image according to the filtered interference light.