# US 2017/0283941 A1 · Cathode Assembly

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- Number: US 2017/0283941 A1
- Document ID: US20170283941A1
- Status: Published application
- Kind: A1
- Application number: 15/507,816
- Filed: 2016-03-15
- Published: 2017-10-05
- Earliest claimed: 2015-03-31
- Assignees: Ulvac, Inc.
- Applicants: Ulvac, Inc.
- Inventors: Shinya Nakamura; Hiroki Yamamoto
- Web page: https://patentgrep.com/patent/US20170283941A1

## CPC

- C23C 14/3407: {Cathode assembly for sputtering apparatus, e.g. Target}
- H01J 37/3423: {Shape}
- H01J 37/3426: {Material}
- H01J 37/3491: {Manufacturing of targets}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A cathode assembly is provided in which, while preventing the occurrence of abnormal electric discharging between a projected portion of a backing plate and a side surface of a target, particles can be prevented from being generated. The cathode assembly for a sputtering apparatus of this invention has: a target made of an insulating material; a backing plate bonded to one surface of the target; and, where such a side of the backing plate as is on the side of the target is defined as a lower side, an annular shield plate disposed to lie opposite to the lower side of that projected portion of the backing plate which is projected outward beyond an outer peripheral end of the target. The cathode assembly has a bonding portion arranged to be protruded relative to the projected portion. An inner peripheral edge portion of the shield plate is positioned in a clearance between that extended portion of the target which is extended outward beyond the bonding portion in a state in which the target is kept bonded to the bonding portion, and the projected portion of the backing plate.

## Claims

### Claim 1

A cathode assembly comprising:
a target made of an insulating material;
a backing plate bonded to one surface of the target; and,
where such a side of the backing plate as is on the side of the target is defined as a lower side, an annular shield plate disposed to lie opposite to the lower side of that projected portion of the backing plate which is projected outward beyond an outer peripheral end of the target,
wherein the backing plate has a bonding portion arranged to be protruded relative to the projected portion, and
wherein an inner peripheral edge portion of the shield plate is positioned in a clearance between that extended portion of the target which is extended outward beyond the bonding portion in a state in which the target is kept bonded to the bonding portion, and the projected portion of the backing plate.

### Claim 2 (depends on 1)

The cathode assembly according to claim 1, wherein the shield plate is divisible into a plurality of portions.

### Claim 3 (depends on 1)

The cathode assembly according to claim 1, wherein a length of a portion in which the extended portion of the target and the shield plate lie opposite to each other in an overlapped manner is above a thickness of the target.

### Claim 4 (depends on 1)

The cathode assembly according to claim 1, wherein the inner peripheral edge portion of the shield plate is positioned, within the clearance, in a position closer to the bonding portion than an intermediate point of the extended portion of the target.

### Claim 5 (depends on 1)

The cathode assembly according to claim 1, wherein the length of the clearance between the shield plate and the backing plate, and the length of the clearance between the shield plate and the target are set to a range of 0.5 mm through 2 mm, respectively.

### Claim 6 (depends on 2)

The cathode assembly according to claim 2, wherein the length of the clearance between the shield plate and the backing plate, and the length of the clearance between the shield plate and the target are set to a range of 0.5 mm through 2 mm, respectively.

### Claim 7 (depends on 3)

The cathode assembly according to claim 3, wherein the length of the clearance between the shield plate and the backing plate, and the length of the clearance between the shield plate and the target are set to a range of 0.5 mm through 2 mm, respectively.