Gas branching apparatus and method for manufacturing fine glass particle deposited body using the same
AssigneeFurukawa Electric Co., Ltd.
InventorTadashi Takahashi
Life of this patent
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Abstract
A gas branching apparatus that branches and supplies a gas to first to N-th supply targets, includes first to N-th pipes wherein the first to N-th pipes are each branched into first to N-th branch pipes on a downstream end side, and wherein the i-th branch pipes of the respective first to N-th pipes are connected in common to the i-th supply target, and the i-th branch pipes of the respective first to N-th pipes are provided with valves, respectively, where i denotes each of integers of 1 to N.
Claims26
A gas branching apparatus that branches and supplies a gas to first to N-th supply targets (where N is an integer of 2 or more), comprising:
- first to N-th pipes,
- wherein the first to N-th pipes are each branched into first to N-th branch pipes on a downstream end side, and
- wherein the i-th branch pipes of the respective first to N-th pipes are connected in common to the i-th supply target, and the i-th branch pipes of the respective first to N-th pipes are provided with respective valves, where i denotes each of integers of 1 to N.
A gas branching apparatus that branches and supplies a gas to first to N-th supply targets (where N is an integer of 2 or more), comprising:
- a plurality of flow dividers each including first to N-th gas outlets through which the gas is branched and discharged;
- and
- a plurality of pipes connecting one of the first to N-th gas outlets of each of the plurality of flow dividers to any of the first to N-th supply targets on a one-to-one basis,
- wherein the first to N-th gas outlets of each of the plurality of flow dividers are located at different positions in the flow divider, and
- wherein the plurality of gas outlets connected to the first to N-th supply targets, respectively, are located at the different positions in the flow dividers each other.
A gas branching apparatus that branches and supplies a gas to first to N-th (where N is an integer of 2 or more) supply targets, comprising:
- a plurality of flow dividers each including first to N-th gas outlets through which the gas is branched and discharged, the flow dividers having different volumes;
- and
- a plurality of pipes connecting one of the first to N-th gas outlets of each of the plurality of flow dividers to any of the first to N-th supply targets on a one-to-one basis.
A gas branching apparatus that branches and supplies a gas to first to N-th (where N is an integer of 2 or more) supply targets, comprising:
- a volume-variable flow divider including first to N-th gas outlets through which the gas is branched and discharged;
- and
- a plurality of pipes connecting one of the first to N-th gas outlets of the flow divider to any of the first to N-th supply targets on a one-to-one basis.
Dependencies are inferred from the claim text.