Inspection device for displacement sensor and inspection method of the same

An inspection device for a displacement sensor for inspecting a periodic variation included in an output characteristic of the displacement sensor, the inspection device for the displacement sensor comprising:

• a sequence data obtaining unit configured to obtain sequence data as an output value of the displacement sensor according to input continuously changing in a constant temporal gradient;
• a difference calculation unit configured to obtain a difference between a value at a certain point in the sequence data and a value at a point advancing from the point by a predetermined evaluation pitch regarding each point in the sequence data to calculate difference sequence data;
• a moving average calculation unit configured to obtain a moving average of a predetermined number of data centered at a certain point in the difference sequence data regarding each point in the difference sequence data to calculate post-averaged sequence data ;
• and
• a determining unit configured to determine that the displacement sensor is normal when an amplitude of an output value of the post-averaged sequence data is smaller than a determination threshold for amplitude.