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US 2017/0256499 A1Published application
Graphene wiring structure and method for manufacturing graphene wiring structure
AssigneeKabushiki Kaisha Toshiba
InventorsHisao MIYAZAKI, Tadashi Sakai, Masayuki Katagiri, Yuichi Yamazaki
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Abstract
A graphene wiring structure of an embodiment has a multilayered graphene having a plurality of planar graphene sheets laminated, and a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets.
Claims7
A graphene wiring structure comprising:
- a multilayered graphene having a plurality of planar graphene sheets laminated;
- and
- a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets.
A method for manufacturing a graphene wiring structure, comprising:
- inserting a metal halide between layers of a multilayered graphene having planar graphene sheets laminated;
- and
- oxidizing the multilayered graphene having planar graphene sheets laminated to form a first interlayer substance being a metal oxyhalide.
Dependencies are inferred from the claim text.