# US 2017/0256431 A1 · Substrate support assembly for high temperature processes > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0256431 A1 - Document ID: US20170256431A1 - Status: Published application - Kind: A1 - Application number: 15/061,734 - Filed: 2016-03-04 - Published: 2017-09-07 - Earliest claimed: 2016-03-04 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Vijay D. Parkhe - Web page: https://patentgrep.com/patent/US20170256431A1 ## CPC - H10P 72/722: {Details of electrostatic chucks} - H10P 72/0432: {mainly by conduction} - H10P 72/0434: {mainly by convection} - H10P 72/0602: {Temperature monitoring} - H10P 72/72: using electrostatic chucks - H10P 72/7614: {characterised by a plurality of individual support members, e.g. support posts or protrusions} - H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An electrostatic chuck comprises a ceramic body having a top and a bottom, one or more heating elements disposed in the ceramic body, and one or more electrodes disposed in the ceramic body. The electrostatic chuck further comprises a plurality of objects bonded to the bottom of the ceramic body by a metal bond, wherein collectively the plurality of objects comprise a plurality of features distributed over the bottom of the ceramic body at a plurality of different distances from a center of a circle defined by the bottom of the ceramic body, and wherein a feature of the plurality of features accommodates a fastener. ## Claims ### Claim 1 An electrostatic chuck comprising: a ceramic body having a top and a bottom; one or more heating elements disposed in the ceramic body; one or more electrodes disposed in the ceramic body; and a plurality of objects bonded to the bottom of the ceramic body by a metal bond, wherein collectively the plurality of objects comprise a plurality of features distributed over the bottom of the ceramic body at a plurality of different distances from a center of a circle defined by the bottom of the ceramic body, and wherein a feature of the plurality of features accommodates a fastener. ### Claim 2 (depends on 1) The electrostatic chuck of claim 1, wherein the plurality of distances comprise a first distance from the center and a second distance from the center, and wherein the plurality of objects comprises: an inner ring or inner disc having a first diameter, the inner ring or inner disc comprising a first subset of the plurality of features that have the first distance from the center; and an outer ring having a second diameter, the outer ring comprising a second subset of the plurality of features that have the second distance from the center. ### Claim 3 (depends on 1) The electrostatic chuck of claim 1, wherein the plurality of objects comprises: a plurality of discs, each of the plurality of discs comprising one of the plurality of features. ### Claim 4 (depends on 1) The electrostatic chuck of claim 1, wherein the bottom of the ceramic body comprises at least one recess, wherein at least one object of the plurality of objects is inserted into the at least one recess, and wherein a bottom of the at least one object is approximately flush with the bottom of the ceramic body. ### Claim 5 (depends on 1) The electrostatic chuck of claim 1, wherein the plurality of objects comprise at least one of a) Molybdenum, b) a nickel-cobalt ferrous alloy, c) a SiC porous body infiltrated with an AlSi alloy, or d) a metal matrix composite comprising Si, SiC and Ti. ### Claim 6 (depends on 1) The electrostatic chuck of claim 1, wherein the ceramic body comprises AlN or Al2O3, and wherein each of the plurality of objects comprises at least one of a metal, a metal alloy, or a metal matrix composite. ### Claim 7 A substrate support assembly comprising: an electrostatic chuck comprising one or more objects bonded to a bottom of the electrostatic chuck by a metal bond, wherein collectively the one or more objects comprise a plurality of features distributed over the bottom of the electrostatic chuck at a plurality of different distances from a center of a circle defined by the bottom of the electrostatic chuck, and wherein collectively the plurality of features accommodate a plurality of fasteners; a base plate coupled to the electrostatic chuck by the plurality of fasteners, wherein the plurality of fasteners each apply an approximately equal fastening force to couple the base plate to the electrostatic chuck; and an o-ring disposed between the electrostatic chuck and the base plate at a periphery of the electrostatic chuck. ### Claim 8 (depends on 7) The substrate support assembly of claim 7, wherein the o-ring is to provide a vacuum seal between the electrostatic chuck and the base plate. ### Claim 9 (depends on 7) The substrate support assembly of claim 7, further comprising: a cooling plate coupled to the base plate by one or more springs, wherein the one or more springs cause the cooling plate to press against the electrostatic chuck. ### Claim 10 (depends on 9) The substrate support assembly of claim 9, further comprising: a gasket disposed on a top side of at least a portion of the cooling plate, wherein the gasket is compressed between the cooling plate and the electrostatic chuck and acts as a thermal choke between the cooling plate and the electrostatic chuck. ### Claim 11 (depends on 10) The substrate support assembly of claim 10, wherein the gasket comprises: a first grafoil layer; a first polyimide layer on the first grafoil layer; and a second grafoil layer on the first polyimide layer. ### Claim 12 (depends on 11) The substrate support assembly of claim 11, wherein the gasket further comprises: a second polyimide layer on the second grafoil layer; and a third grafoil layer on the second polyimide layer. ### Claim 13 (depends on 9) The substrate support assembly of claim 9, wherein the plurality of objects form a pattern that projects from the bottom of the electrostatic chuck, wherein a top of the cooling plate comprises a plurality of recesses that form a negative of the pattern, and wherein the pattern that projects from the bottom of the electrostatic chuck fits into the negative of the pattern in the top of the cooling plate. ### Claim 14 (depends on 7) The substrate support assembly of claim 7, wherein the plurality of distances comprise a first distance from the center and a second distance from the center, and wherein the one or more objects comprise: an inner ring or inner disc having a first diameter, the inner ring or inner disc comprising a first subset of the plurality of features that have the first distance from the center; and an outer ring having a second diameter, the outer ring comprising a second subset of the plurality of features that have the second distance from the center. ### Claim 15 (depends on 7) The substrate support assembly of claim 7, wherein the one or more objects comprise: a plurality of discs, each of the plurality of discs comprising one of the plurality of features. ### Claim 16 (depends on 7) The substrate support assembly of claim 7, wherein the bottom of the electrostatic chuck comprises at least one recess, wherein at least one object of the plurality of objects is inserted into the at least one recess, and wherein a bottom of the at least one object is approximately flush with the bottom of the electrostatic chuck. ### Claim 17 (depends on 7) The substrate support assembly of claim 7, wherein the plurality of objects comprise at least one of a) Molybdenum, b) a nickel-cobalt ferrous alloy, c) a SiC porous body infiltrated with an AlSi alloy, or d) a metal matrix composite comprising Si, SiC and Ti. ### Claim 18 (depends on 7) The substrate support assembly of claim 7, further comprising: a first gas delivery passage in the base plate; a second gas delivery passage in the electrostatic chuck that lines up with the first gas delivery passage in the base plate; and an o-ring at a border of the first gas delivery passage and the second gas delivery passage to provide a seal. ### Claim 19 (depends on 7) The substrate support assembly of claim 7, wherein the plurality of fasteners comprise a plurality threaded fasteners and the plurality of features comprise a plurality of openings for receiving the plurality of threaded fasteners. ### Claim 20 A base plate for a substrate support assembly, comprising: a metal body comprising a recess, the metal body comprising one or more features that accommodate a fastener; a metal cooling plate disposed in the recess, the metal cooling plate comprising a plurality of channels to receive a coolant, the metal cooling plate further comprising one or more surface features on a top of the metal cooling plate; a plurality of springs that connect a bottom of the metal cooling plate to the metal body; and a thermal gasket on the top of the cooling plate, the thermal gasket comprising one or more layers of polyimide and a plurality of layers of grafoil.