# US 2017/0256386 A1 · Magnetic Spattering Coating Device and Target Device Thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2017/0256386 A1 - Document ID: US20170256386A1 - Status: Published application - Kind: A1 - Application number: 14/904,141 - Filed: 2015-12-11 - Published: 2017-09-07 - Earliest claimed: 2015-11-24 - Assignees: Shenzhen China Star Optoelectronics Technology Co., Ltd.; Wuhan China Star Optoelectronics Technology Co., Ltd. - Applicants: Shenzhen China Star Optoelectronics Technology Co Ltd.; Wuhan China Star Optoelectronics Technology Co., Ltd. - Inventors: Tao ZHOU - Web page: https://patentgrep.com/patent/US20170256386A1 ## CPC - H01J 37/3435: {Target holders (includes backing plates and endblocks)} - C23C 14/3407: {Cathode assembly for sputtering apparatus, e.g. Target} - C23C 14/35: by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} - H01J 37/3408: {Planar magnetron sputtering} - H01J 37/345: {Magnet arrangements in particular for cathodic sputtering apparatus (material of magnets or magnets in general H01F1/00, H01F7/00)} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract A target device for a magnetic spattering coating device includes: a spattering target fixture; a target bearing plate installed on the spattering target fixture, for bearing a target; a magnetic pole device fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target. A predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate. The present invention can not only enhances utilization of the target but also makes the thin film deposited on the substrate highly well-distributed. ## Claims ### Claim 1 A target device for a magnetic spattering coating device, comprising: a spattering target fixture; a target bearing plate, installed on the spattering target fixture, for bearing a target; a magnetic pole device, fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target; wherein a predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate. ### Claim 2 (depends on 1) The target device of claim 1, wherein the magnetic pole device moves backwards and forwards between a first predetermined spot outside left margins of the target bearing plate and a second predetermined spot outside right margins of the target bearing plate. ### Claim 3 (depends on 2) The target device of claim 2, wherein the magnetic pole device moves backwards and forwards between a first predetermined spot outside left margins of the target bearing plate and a second predetermined spot outside right margins of the target bearing plate. ### Claim 4 (depends on 2) The target device of claim 2, wherein a interval between the left margins of the target bearing plate and the first predetermined spot is settled as a first interval, a interval between the right margins of the target bearing plate and the second predetermined spot is settled as a second interval, and the width of the first interval is equal to the width of the second interval. ### Claim 5 (depends on 3) The target device of claim 3, wherein a interval between the left margins of the target bearing plate and the first predetermined spot is settled as a first interval, a interval between the right margins of the target bearing plate and the second predetermined spot is settled as a second interval, and the width of the first interval is equal to the width of the second interval. ### Claim 6 (depends on 4) The target device of claim 4, wherein a first accelerating/decelerating segment, an average speed segment, and a second accelerating/decelerating segment are arranged in order from the first predetermined spot to the second predetermined spot between the first predetermined spot and the second predetermined spot; the first accelerating/decelerating segment being opposite to the first interval, the average speed segment being opposite to an area occupied by the target bearing plate, and the second accelerating/decelerating segment being opposite to the second interval. ### Claim 7 (depends on 5) The target device of claim 5, wherein a first accelerating/decelerating segment, an average speed segment, and a second accelerating/decelerating segment are arranged in order from the first predetermined spot to the second predetermined spot between the first predetermined spot and the second predetermined spot; the first accelerating/decelerating segment being opposite to the first interval, the average speed segment being opposite to an area occupied by the target bearing plate, and the second accelerating/decelerating segment being opposite to the second interval. ### Claim 8 (depends on 6) The target device of claim 6, wherein the first accelerating/decelerating segment faces toward the first interval, and the width of the first accelerating/decelerating segment is equal to the width of the first interval. ### Claim 9 (depends on 7) The target device of claim 7, wherein the first accelerating/decelerating segment faces toward the first interval, and the width of the first accelerating/decelerating segment is equal to the width of the first interval. ### Claim 10 (depends on 8) The target device of claim 8, wherein the second accelerating/decelerating segment faces toward the second interval, and the width of the second accelerating/decelerating segment is equal to the width of the second interval. ### Claim 11 (depends on 9) The target device of claim 9, wherein the second accelerating/decelerating segment faces toward the second interval, and the width of the second accelerating/decelerating segment is equal to the width of the second interval. ### Claim 12 (depends on 1) The target device of claim 1, wherein the target bearing plate is fabricated from copper. ### Claim 13 A magnetic spattering coating device comprising a target device, the target device comprising: a spattering target fixture; a target bearing plate, installed on the spattering target fixture, for bearing a target; a magnetic pole device, fixed on one surface of the spattering target fixture backing toward the target bearing plate, for producing a horizontal magnetic field on one surface of the target; wherein a predetermined interval is formed between the magnetic pole device and corresponding margins of the target bearing plate.