Graphene oxide based acoustic transducer methods and devices
AssigneeThe Royal Institution for the Advancement of Learning/Mcgill University
InventorsPeter GASKELL, Robert-Eric GASKELL, Thomas SZKOPEK, Jung Wook HONG
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Abstract
Materials used in acoustic transducer membranes need very specific qualities that in any real system require many tradeoffs to be made. Graphene and graphene related materials are a newly discovered class of materials with some exceptional properties that offer the potential for significant contributions to the performance of many acoustical transduction systems. Accordingly the inventors have established graphene oxide based transducers as the basis of ribbon microphones and diaphragm loudspeakers using low cost manufacturing and processing techniques.
Claims15
A method of forming an acoustic transducer comprising:
- depositing and processing a graphene containing material from solution to form a graphene containing film;
- and
- thermally processing the graphene containing film to adjust its electrical characteristics.
A method of forming an acoustic transducer comprising:
- fabricating a first predetermined portion of a MEMS acoustic transducer using a silicon based MEMS manufacturing process;
- and
- fabricating a second predetermined portion of the MEMS acoustic transducer by depositing and processing a graphene containing material.
An acoustic transducer element comprising at least a graphene containing material.
Dependencies are inferred from the claim text.