Back to results
US 2017/0250672 A1Published application
Bulk acoustic wave resonator
AssigneeSamsung Electronics Co., Ltd.
InventorsJea Shik SHIN, Duck Hwan KIM, Chul Soo KIM, Sang Uk SON, In Sang SONG, Moon Chul LEE
Life of this patent
Estimating the term…
Abstract
Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit.
Claims30
A film bulk acoustic wave resonator (BAWR), comprising:
- a resonance unit comprising
- a first electrode,
- a second electrode, and
- a piezoelectric layer disposed between the first electrode and the second electrode;
- an air gap disposed below the resonance unit;
- and
- an air edge provided distant from a center of the resonance unit to interface with the air gap before an edge of the air gap,
- wherein the air gap is configured to reflect acoustic waves of the resonance unit in a vertical direction and the air edge is configured to reflect acoustic waves of the resonance unit in a horizontal direction.
5 more elements
A film bulk acoustic wave resonator (BAWR), comprising:
- a resonance unit comprising
- a first electrode,
- a second electrode, and
- a piezoelectric layer disposed between the first electrode and the second electrode;
- and
- an air edge provided distant from a center of the resonance unit,
- wherein the first electrode comprises:
- a portion in a form of a finger, in contact with a portion of an edge of the resonance unit;
- and
- a patterned portion exposed to the air edge.
7 more elements
A film bulk acoustic wave resonator (BAWR), comprising:
- an air gap;
- a resonance unit comprising
- a first electrode disposed above the air gap,
- a piezoelectric layer disposed above the first electrode, and
- a second electrode disposed above the piezoelectric layer;
- and
- plural air edges formed at a distance from a center of the air gap and respectively interfacing with the air gap before an edge of the air gap,
- wherein the plural air edges are configured to control acoustic wave reflectivity of the resonance unit.
5 more elements
Dependencies are inferred from the claim text.