Elastic wave device and manufacturing method for the same
AssigneeMurata Manufacturing Co., Ltd.
InventorsMasashi OMURA, Tetsuya KIMURA, Yutaka KISHIMOTO
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AssigneeMurata Manufacturing Co., Ltd.
InventorsMasashi OMURA, Tetsuya KIMURA, Yutaka KISHIMOTO
Estimating the term…
In an elastic wave device, a piezoelectric substrate is laminated on a support substrate including a recess. On one of a first principal surface and a second principal surface of the piezoelectric substrate, a functional electrode including an IDT electrode is provided. Passing-through sections are provided in the piezoelectric substrate and connected to a hollow section enclosed by the recess and the piezoelectric substrate. In a plan view of the piezoelectric substrate seen from the first principal surface, at least a portion of the passing-through sections is inside a minimum rectangular or substantially rectangular region encompassing an outer circumference of a region including the functional electrode.
An elastic wave device comprising:
A manufacturing method for an elastic wave device, the method comprising:
Dependencies are inferred from the claim text.