Extreme ultraviolet light generating apparatus

An extreme ultraviolet light generating apparatus that irradiates a target with a pulsed laser beam output from a laser apparatus to generate plasma, thereby generating extreme ultraviolet light, comprising:

• a chamber;
• a target supply unit configured to output the target into the chamber;
• and
• a beam adjusting apparatus configured to adjust beam parameters, provided along the optical path of the pulsed laser beam which is irradiated onto the target;
• the beam adjusting apparatus comprising:
• a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam;
• a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors;
• and
• a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.