Shadow mask, method of manufacturing a shadow mask and method of manufacturing a display device using a shadow mask
AssigneeJapan Display Inc.
InventorTakeshi OKAWARA
Life of this patent
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Abstract
A shadow mask is used for patterning in a film deposition process in which a film deposition material is deposited by vapor deposition or sputtering. The shadow mask includes a first resin film provided on a side facing a film deposition target, a metal part having a slit formed therein and provided on top of the first resin film, and a second resin film provided in such a way as to cover at least a part of a top of the metal part. The second resin film is provided on a side exposed to a film deposition material, and a surface of the second resin film is roughened.
Claims8
A shadow mask comprising:
- a first resin film provided on a side facing a film deposition target;
- a metal part having a slit formed therein and provided on top of the first resin film;
- and
- a second resin film provided in such a way as to cover at least a part of a top of the metal part,
- wherein the second resin film is provided on a side exposed to a film deposition material, and a surface of the second resin film is roughened.
A method of manufacturing a shadow mask, the method comprising steps of:
- forming a first resin film on a base;
- bonding a metal part having a slit provided therein onto the first resin film;
- eliminating the first resin film formed at a part of an area where the slit is provided;
- forming a second resin film in such a way as to cover the metal part, the first resin film, and the base;
- roughening a surface of the second resin film;
- forming an opening corresponding to a pattern to be prepared, in the second resin film;
- and
- eliminating the base.
A method of manufacturing a display device, the method comprising steps of:
- forming a first resin film on a base;
- bonding a metal part having a slit provided therein onto the first resin film;
- eliminating the first resin film formed at a part of an area where the slit is provided;
- forming a second resin film in such a way as to cover the metal part, the first resin film, and the base;
- roughening a surface of the second resin film;
- forming an opening corresponding to a pattern to be prepared, in the second resin film;
- eliminating the base and obtaining a shadow mask;
- and
- forming a film of the pattern in a display panel, using the shadow mask.
Dependencies are inferred from the claim text.