Display device, and method and apparatus for manufacturing the same
AssigneeJapan Display Inc.
InventorsToshio TOJO, Hideki OZAWA, Yuki HAMADA
Life of this patent
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Abstract
A method for manufacturing a display device includes a first step of placing a substrate having a lower electrode formed thereon in a vacuum environment; a second step of forming in a vacuum an organic layer that includes a light emitting layer and covers the lower electrode; a third step of forming in a vacuum an upper electrode that covers the organic layer; a fourth step of forming in a vacuum a sealing layer that covers the upper electrode; and a cleaning step of cleaning the substrate after end of the first step before end of the fourth step.
Claims19
A method for manufacturing a display device, the method comprising:
- placing a substrate having a lower electrode formed thereon in a vacuum environment, as a first step;
- forming an organic layer that includes a light emitting layer and covers the lower electrode in a vacuum environment, as a second step;
- forming an upper electrode that covers the organic layer in a vacuum environment, as a third step;
- forming a sealing layer that covers the upper electrode in a vacuum environment, as a fourth step;
- and
- cleaning the substrate after end of the first step before end of the fourth step, as a cleaning step.
A display device, comprising:
- a substrate;
- a plurality of pixels formed on the substrate;
- a lower electrode provided to each of the plurality of pixels;
- a pixel separation film formed on the substrate, configured to cover an end portion of the lower electrode so as to leave a middle part of the lower electrode exposed, and configured to define the plurality of pixels;
- an organic layer being in contact with the portion of the lower electrode exposed from the pixel separation film, positioned on the pixel separation film, and including a light emitting layer;
- an upper electrode formed on the organic layer;
- and
- a sealing layer formed on the upper electrode, wherein
- the upper electrode has a hole formed on a surface thereof in contact with the sealing layer.
An apparatus for manufacturing a display device, comprising:
- a vacuum introduction unit for placing a substrate having a lower electrode formed thereon in a vacuum environment;
- an organic layer forming unit connected to the vacuum introduction unit via a first convey mechanism, for forming an organic layer that includes a light emitting layer and covers the lower electrode on the substrate in a vacuum environment;
- an upper electrode forming unit connected to the organic layer forming unit via a second convey mechanism, for forming an upper electrode that covers the organic layer in a vacuum environment;
- a sealing layer forming unit connected to the upper electrode forming unit via a third convey mechanism, for forming a sealing layer that covers the upper electrode in a vacuum environment;
- and
- a cleaning unit connected to at least one of the organic layer forming unit, the upper electrode forming unit, and the sealing layer forming unit via a fourth convey mechanism, for cleaning the substrate.
Dependencies are inferred from the claim text.