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US 2017/0250306 A1Published application
Photodetector and methods of manufacture
AssigneeGlobalfoundries Inc.
InventorsJohn J. ELLIS-MONAGHAN, John C.S. HALL, Marwan H. KHATER, Edward W. KIEWRA, Steven M. SHANK
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Abstract
Photodetector structures and methods of manufacture are provided. The method includes forming undercuts about detector material formed on a substrate. The method further includes encapsulating the detector to form airgaps from the undercuts. The method further includes annealing the detector material causing expansion of the detector material into the airgaps.
Claims20
A method comprising:
- forming undercuts about detector material formed on a substrate;
- encapsulating the detector to form airgaps from the undercuts;
- and
- annealing the detector material causing expansion of the detector material into the airgaps.
1 more element
A method comprising:
- forming a first insulator material on a substrate;
- forming a detector material on the first insulator material;
- forming a second insulator material on the detector material;
- forming a masking material on the second insulator material;
- patterning of the first insulator material, the second insulator, the detector material and the masking material to define a detector with insulator tabs;
- removing the insulator tabs above and below the detector material to form undercuts;
- encapsulating the detector to form airgaps from the undercuts;
- and
- annealing the detector material causing expansion of the detector material into the airgaps.
6 more elements
A method, comprising;
- expanding an encapsulated crystalline detector material over a first layer of insulating material;
- forming a second layer of insulating material on an upper surface of the expanded crystalline detector material and aligned with edges of the encapsulated expanded crystalline detector;
- and
- forming an encapsulated material on a surface of the second layer of insulating material and in contact with the edges of the encapsulated expanded crystalline detector, wherein
- the second layer of insulating material has an undercut portion,
- the expanded encapsulated crystalline detector material is located within the undercut portion of the second layer of insulating material, and
- the first layer of insulating material, the second layer of insulating material and the encapsulated material encapsulates the expanded encapsulated crystalline detector.
4 more elements
Dependencies are inferred from the claim text.