Serial capacitor device with middle electrode contact
AssigneeGlobalfoundries Inc.
InventorsKi Young LEE, Woong Lae CHO, Jae Ho JOUNG
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Abstract
A capacitor includes a bottom electrode and a top electrode positioned above the bottom electrode. The top electrode and the bottom electrode are conductively coupled to one another. A middle electrode is positioned between the bottom electrode and the top electrode. A lower dielectric layer is positioned between the bottom electrode and the middle electrode. An upper dielectric layer is positioned between the middle electrode and the top electrode. A first contact is conductively coupled to the top electrode. A second contact is conductively coupled to the middle electrode.
Claims16
A capacitor, comprising:
- a bottom electrode;
- a top electrode positioned above said bottom electrode, said top electrode and said bottom electrode being conductively coupled to one another;
- a middle electrode positioned between said bottom electrode and said top electrode;
- a lower dielectric layer positioned between said bottom electrode and said middle electrode;
- an upper dielectric layer positioned between said middle electrode and said top electrode;
- a first contact conductively coupled to said top electrode;
- and
- a second contact conductively coupled to said middle electrode.
A capacitor, comprising:
- a bottom electrode;
- a top electrode positioned above said bottom electrode, said top electrode and said bottom electrode being conductively coupled to one another;
- a middle electrode positioned between said bottom electrode and said top electrode, wherein said middle electrode comprises an extension portion that is coplanar with said top electrode;
- a lower dielectric layer positioned between said bottom electrode and said middle electrode;
- an upper dielectric layer positioned between said middle electrode and said top electrode;
- an isolation region of dielectric material formed above a portion of said extension portion and laterally disposed between said extension portion and said top electrode;
- a first contact conductively coupled to said top electrode;
- and
- a second contact conductively coupled to said middle electrode.
Dependencies are inferred from the claim text.