Semiconductor devices including stacked electrodes

A semiconductor device, comprising:

• a substrate comprising a cell array region and a connection region;
• first and second electrode structures that extend in a first direction on the substrate and are spaced apart from each other in a second direction that intersects the first direction, each of the first and second electrode structures comprising first and second electrodes vertically and alternatingly stacked on the substrate and comprising a stair-step structure on the connection region,
• wherein each of the first electrodes comprises a first pad region at an end portion thereof and each of the second electrodes comprises a second pad region at an end portion thereof, and
• wherein, when viewed in a plan view, the first pad regions are arranged in the first direction and each of the second pad regions is adjacent a corresponding one of the first pad regions in the second direction;
• first contacts coupled to the first pad regions, respectively;
• second contacts coupled to the second pad regions, respectively;
• first connection lines, each of which connects ones of the first contacts that are adjacent each other in the second direction;
• second connection lines, each of which connects ones of the second contact plugs that are adjacent each other in the second direction;
• first metal lines, each of which is connected to ones of the first connection lines in a first group and ones of the second connection lines in the first group;
• and
• second metal lines at a higher level than the first metal lines, wherein each of the second metal lines is connected to ones of the first connection lines in a second group and ones of the second connection lines in the second group.

A semiconductor device comprising:

• first and second stacks of electrodes;
• a plurality of first connection lines, comprising a first length, that connect inner portions of the first stack of electrodes to inner portions of the second stack of electrodes;
• and
• a plurality of second connection lines, comprising a second length longer than the first length, that connect outer portions of the first stack of electrodes to outer portions of the second stack of electrodes.