Efficiently micro-transfer printing micro-scale devices onto large-format substrates

A system for making a micro-transfer printed device, comprising:

• a source wafer having a plurality of micro-transfer printable source devices arranged in or on the source wafer at a source spatial density;
• an intermediate wafer having a plurality of micro-transfer printable intermediate supports arranged in or on the intermediate wafer at an intermediate spatial density less than or equal to the source spatial density;
• a destination substrate;
• a source stamp having a source transfer density;
• an intermediate stamp having an intermediate transfer density less than the source transfer density;
• a micro-transfer printer for micro-transfer printing the source devices from the source wafer to the intermediate supports of the intermediate wafer with a source stamp at a source transfer density to make an intermediate device on each intermediate support;
• and
• a micro-transfer printer for micro-transfer printing the intermediate devices from the intermediate wafer to the destination substrate at a destination spatial density less than the source spatial density with an intermediate stamp at an intermediate transfer density less than the source transfer density.