Imaging system and manufacturing apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsAkio ENDO, Yusuke YOSHITANI, Jun KOYAMA, Naoto KUSUMOTO
Life of this patent
Estimating the term…
Loading patent…
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsAkio ENDO, Yusuke YOSHITANI, Jun KOYAMA, Naoto KUSUMOTO
Estimating the term…
An imaging system using ultraviolet light or a manufacturing apparatus including the imaging system is provided. An imaging system includes an imaging element and a light source, which operates the imaging element with light that is emitted from the light source and reflected or transmitted by an object. A pixel included in the imaging element includes a photoelectric conversion element and a charge holding part. The light source has a function of emitting ultraviolet light to an object. The photoelectric conversion element is irradiated with the ultraviolet light reflected or transmitted by the object. The photoelectric conversion element has a function of changing the potential of the charge holding part when irradiated with the ultraviolet light and retaining the potential when not irradiated with the ultraviolet light.
An imaging system comprising:
An imaging system comprising:
Dependencies are inferred from the claim text.