Fluoro polymer contact layer to carbon nanotube chuck
AssigneeApplied Materials, Inc.
InventorsRobert Jan VISSER, Sangmin JEONG, Ananth DODABALAPUR
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Abstract
Embodiments described herein generally relate to methods and apparatuses for manufacturing devices. An improved substrate support assembly having a fluoro polymer layer disposed at one or more interfaces between a substrate and a susceptor and method for processing a substrate utilizing the same are provided. The fluoro polymer layer disposed at one or more interfaces between the substrate and the susceptor allows the substrate to adhere firmly to the susceptor, and allows the substrate and the susceptor to withstand greater shear forces, thus minimizing movement between the substrate and the susceptor.
Claims15
A susceptor, comprising:
- a susceptor body having a first surface for supporting a substrate and a second surface opposite the first surface;
- a first fluoro polymer layer disposed on the first surface of the susceptor body;
- and
- a graphene layer disposed on the first fluoro polymer layer, wherein the second surface of the susceptor body comprises anodized aluminum.
A substrate, comprising:
- a polyimide layer disposed on a first surface of the substrate;
- a first fluoro polymer layer disposed on the polyimide layer;
- and
- one or more thin film layers disposed on a second surface of the substrate, the second surface of the substrate being opposite the first surface of the substrate.
A method of processing a substrate, comprising:
- applying a polyimide layer to the substrate;
- applying a first fluoro polymer layer to the polyimide layer;
- inserting the substrate into a chamber;
- and
- placing the substrate onto a susceptor having a graphene surface, wherein the fluoro polymer layer of the substrate contacts the graphene surface of the susceptor.
The method of claim 18, wherein the first fluoro polymer layer has a thickness within a range of about 10 angstroms to about 20 angstroms and the polyimide layer has a thickness within a range of about 10 angstroms to about 20 angstroms.
Dependencies are inferred from the claim text.