Electrostatic chuck having thermally isolated zones with minimal crosstalk

A method of manufacturing an electrostatic chuck, comprising:

• forming a thermally conductive base having a plurality of conduits;
• forming a plurality of thermal isolators in the thermally conductive base, wherein the plurality of thermal isolators extend from an upper surface of the thermally conductive base towards a lower surface of the thermally conductive base, wherein the plurality of thermal isolators define a plurality of thermal zones in the thermally conductive base, wherein each of the plurality of thermal isolators is between adjacent conduits of the plurality of conduits, and wherein at least a portion of a first thermal isolator of the plurality of thermal isolators has a different depth than at least a portion of a second thermal isolator of the plurality of thermal isolators;
• and
• bonding the upper surface of the thermally conductive base to an electrostatic puck.