Charged particle beam apparatus and vibration damper for charged particle beam apparatus
AssigneeHitachi High-Technologies Corporation
InventorsMotohiro TAKAHASHI, Yoshimasa FUKUSHIMA, Katsunori ONUKI, Tetsuya NIIBORI
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Abstract
There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.
Claims8
A charged particle beam apparatus which includes a first charged particle beam apparatus column that surrounds a first charged particle passage track through which charged particles pass, the charged particle beam apparatus comprising:
- a second charged particle beam apparatus column that surrounds a second charged particle passage track which is positioned at a position different from that of the first charged particle passage track;
- and
- a connection member one end of which is attached to the first charged particle beam apparatus column and the other end is attached to the second charged particle beam apparatus column,
- wherein the connection member includes a plurality of plate-shaped members and a viscoelastic sheet which is interposed between the plurality of plate-shaped members.
A vibration damper for a charged particle beam apparatus which connects a first charged particle beam apparatus column and a second charged particle beam apparatus column, the vibration damper comprising:
- a connection member one end of which is attached to the first charged particle beam apparatus column and the other end is attached to the second charged particle beam apparatus column,
- wherein the connection member includes a plurality of plate-shaped members and a viscoelastic sheet which is interposed between the plurality of plate-shaped members.
Dependencies are inferred from the claim text.