High voltage shielding and cooling in a charged particle beam generator
AssigneeMapper Lithography IP B.V.
InventorsAlexander Hendrik Vincent VAN VEEN, Willem Henk URBANUS
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Abstract
The invention relates to a charged particle beam generator. The generator may comprise a high voltage shielding arrangement (201) for shielding components outside the shielding arrangement from high voltages within the shielding arrangement, and a vacuum pump (220) located outside the shielding arrangement for regulating a pressure of a space within the shielding arrangement. The generator may comprise a collimator system with a cooling arrangement (405a/407a-407b/405b) comprising cooling channels inside electrodes of the collimator system.
Claims37
A charged particle beam generator comprising:
- a charged particle source for generating a charged particle beam;
- a collimator system comprising electrodes for collimating the charged particle beam;
- a high voltage shielding arrangement for shielding components outside the high voltage shielding arrangement from high voltages within the high voltage shielding arrangement;
- and
- at least one vacuum pump for regulating a pressure of a space within the high voltage shielding arrangement,
- wherein the at least one vacuum pump is a component outside the high voltage shielding arrangement.
A charged particle lithography system for exposing a target, the system comprising:
- a charged particle beam generator for generating a charged particle beam;
- an aperture array for forming a plurality of beamlets from the charged particle beam;
- and
- a beamlet projector for projecting the beamlets onto a surface of the target,
- wherein the charged particle beam generator comprises:
- a charged particle source for generating the charged particle beam;
- a collimator system comprising electrodes for collimating the charged particle beam;
- a high voltage shielding arrangement for shielding components outside the high voltage shielding arrangement from high voltages within the high voltage shielding arrangement;
- and
- at least one vacuum pump for regulating a pressure of a space within the high voltage shielding arrangement,
- wherein the at least one vacuum pump is a component outside the high voltage shielding arrangement.
A cooling arrangement of a collimator system of a charged particle beam generator, wherein the collimator system comprises electrodes for collimating a charged particle beam generated by the charged particle beam generator, the cooling arrangement comprising one or more cooling channels for accommodating a flow of cooling fluid, wherein the one or more cooling channels are arranged inside at least one of the electrodes of the collimator system.
Dependencies are inferred from the claim text.