Defect observation apparatus
AssigneeHitachi High-Technologies Corporation
InventorsYuko OTANI, Kazuo AOKI, Yohei MINEKAWA
Life of this patent
Estimating the term…
Abstract
A defect observation apparatus includes a storage unit configured to store defect information about defects detected by an external inspection apparatus; a first imaging unit configured to capture an image of a defect using a first imaging condition and a second imaging condition; a control unit configured to correct positional information on the defect using the image captured with the first imaging unit; and a second imaging unit configured to capture an image of the defect based on the corrected positional information.
Claims13
A defect observation apparatus, comprising:
- a storage unit configured to store defect information about a plurality of defects detected by an external inspection apparatus;
- a first imaging unit configured to capture an image of a defect among the plurality of defects using a first imaging condition and a second imaging condition, the first imaging condition being related to wide field-of-view imaging and the second imaging condition being related to narrow field-of-view imaging;
- a control unit configured to correct positional information on the defect using the image captured with the first imaging unit;
- and
- a second imaging unit configured to capture an image of the defect on the basis of the corrected positional information,
- wherein:
- the control unit is configured to
- set one of the first imaging condition or the second imaging condition for each of the plurality of defects,
- capture an image of a first-defect that is set to the first imaging condition, using the first imaging unit,
- calculate a correction formula on the basis of the defect information on the first-defect and positional information on the first-defect detected with the first imaging unit,
- correct positional information on a second-defect that is set to the second imaging condition, using the correction formula, and
- capture an image of the second-defect using the first imaging unit on the basis of the corrected positional information on the second-defect.
A defect observation apparatus, comprising:
- a storage unit configured to store defect information about a plurality of defects detected by an external inspection apparatus;
- a first imaging unit configured to capture an image of a defect corresponding to a specified defect ID;
- a control unit configured to correct positional information on the defect using the image captured with the first imaging unit;
- and
- a second imaging unit configured to capture an image of the defect on the basis of the corrected positional information,
- wherein:
- the control unit is configured to, when the image captured with the first imaging unit contains a plurality of defects,
- extract, from the defect information, candidate defects that are possibly contained in the captured image,
- identify, in the captured image, the defect corresponding to the defect ID on the basis of a relative relationship between the candidate defects and a relative relationship between the plurality of defects contained in the captured image, and
- correct positional information on the defect corresponding to the defect ID.
Dependencies are inferred from the claim text.