Image Inspection Device, Image Inspection Method, Image Inspection Program, And Computer-Readable Recording Medium And Recording Equipment

An image inspection device for conducting outer appearance inspection, based on height information of an inspection object, the image inspection device comprising:

• an irradiation part configured to apply measurement light to the inspection object relatively moved in one direction;
• a detection part configured to detect reflected light that is applied from the irradiation part to the inspection object and is reflected at the inspection object, the reflected light including a vibration component in a height direction;
• a two-dimensional profile generation part configured to generate a two-dimensional profile indicating a cross-sectional shape of the inspection object, based on detection data obtained by the detection part;
• a reference height setting part configured to set a reference height as a reference of vibration component estimation, based on three-dimensional data before the vibration component obtained from a plurality of the two-dimensional profiles is removed;
• a vibration estimation part configured to estimate the vibration component in an inspection environment, based on the two-dimensional profile generated by the two-dimensional profile generation part and the reference height set by the reference height setting part;
• a profile correction part configured to remove, from each of the two-dimensional profiles, the vibration component estimated by the vibration estimation part;
• a three-dimensional data generation part configured to generate the three-dimensional data of the inspection object from the plurality of two-dimensional profiles from which the vibration component is removed by the profile correction part;
• and
• an inspection part configured to conduct the outer appearance inspection of the inspection object, based on the three-dimensional data generated by the three-dimensional data generation part.