Method and apparatus for determining a defocussing value and for image-based determination of a dimensional size
AssigneeCarl Zeiss Industrielle Messtechnik GmbH
InventorsPhilipp JESTER, Oliver SCHWARZ, Michael TOTZECK, Matthias BARNERT, Dirk DOERING, Rainer SCHMIDT
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Abstract
The invention relates to an apparatus and a method for determining a defocussing value (Δz, Δz1, Δz2) for at least one image feature in an image, wherein at least one monochromatic image of an object is generated, wherein the defocussing value (Δz, Δz1, Δz2) is determined on the basis of the image and depending on the wavelength (λ) of the monochromatic image, and a method and apparatus for image-based determination of a dimensional size.
Claims13
Method for determining a defocussing value (Δz, Δz1, Δz2) for at least one image feature in an image,
- characterized in that
- at least one monochromatic image of an object is generated, wherein the defocussing value (Δz, Δz1, Δz2) is determined on the basis of the image and depending on the wavelength (λ) of the monochromatic image.
Apparatus for determining a defocussing value (Δz, Δz1, Δz2) for at least one image feature in an image, wherein the apparatus comprises at least one evaluating device,
- characterized in that
- the defocussing value (Δz, Δz1, Δz2) is determinable by means of the evaluating device on the basis of the image and depending on the wavelength (λ) of the monochromatic image.
Dependencies are inferred from the claim text.