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AssigneeCascade Microtech, Inc.
InventorsMichael Teich, Jörg Kiesewetter, Ulf Hackius, Frank Zill, Mirko Kreher
Estimating the term…
Probe systems and methods including active environmental control are disclosed herein. The methods include placing a substrate, which includes a device under test (DUT), on a support surface of a chuck. The support surface extends within a measurement environment that is at least partially surrounded by a measurement chamber. The methods further include determining a variable associated with a moisture content of the measurement environment and receiving a temperature associated with the measurement environment. The methods also include supplying a purge gas stream to the measurement chamber at a purge gas flow rate and selectively varying the purge gas flow rate such that a dew point temperature of the measurement environment is within a target dew point temperature range. The methods further include providing a test signal to the DUT and receiving a resultant signal from the DUT. The systems include probe systems that perform the methods.
A method of testing a device under test (DUT), the method comprising:
A probe system, comprising:
Dependencies are inferred from the claim text.