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US 2017/0248805 A1Published application
Efficient Thermo-Optic Phase Shifters Using Multi-Pass Heaters
AssigneeInternational Business Machines Corporation
InventorsDouglas M. Gill, Chi Xiong
Life of this patent
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Abstract
Techniques for increasing efficiency of thermo-optic phase shifters using multi-pass heaters and thermal bridges are provided. In one aspect, a thermo-optic phase shifter device includes: a plurality of optical waveguides formed in an SOI layer over a buried insulator; at least one heating element adjacent to the optical waveguides; and thermal bridges connecting at least one of the optical waveguides directly to the heating element. A method for forming a thermo-optic phase shifter device is also provided.
Claims20
A thermo-optic phase shifter device, comprising:
- a plurality of optical waveguides formed in a silicon-on-insulator (SOI) layer over a buried insulator;
- at least one heating element adjacent to the optical waveguides;
- and
- thermal bridges connecting at least one of the optical waveguides directly to the heating element.
1 more element
Dependencies are inferred from the claim text.