Grating, method for manufacturing grating, and method for recycling grating
AssigneeGigaphoton Inc.
InventorsHirotaka MIYAMOTO, Osamu WAKABAYASHI
Life of this patent
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Abstract
A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region may include: a grating substrate; a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof; and a first protective film formed by an ALD method above the first aluminum metal film.
Claims9
A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region,
- the grating comprising:
- a grating substrate;
- a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof;
- and
- a first protective film formed by an ALD method above the first aluminum metal film.
A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region,
- the grating comprising:
- a grating substrate;
- a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof;
- a first protective film formed above the first aluminum metal film;
- a second aluminum metal film formed above the first protective film;
- and
- a second protective film formed above the second aluminum metal film.
A method for manufacturing a grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region,
- the method comprising:
- forming, above a grating substrate, a first aluminum metal film having grooves in a surface thereof;
- and
- forming a first protective film by an ALD method above the first aluminum metal film.
A method for recycling a grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region, the grating including a grating substrate, a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof, and a first protective film formed above the first aluminum metal film,
- the method comprising:
- forming a second aluminum metal film above the first protective film;
- and
- forming a second protective film above the second aluminum metal film.
A method for recycling a grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region, the grating including a grating substrate, a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof, and a first protective film formed above the first aluminum metal film,
- the method comprising:
- etching at least a part of the first protective film;
- forming a second aluminum metal film above the first aluminum metal film;
- and
- forming a second protective film above the second aluminum metal film.
Dependencies are inferred from the claim text.