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US 2017/0248632 A1Published application
Thermal control of a probe card assembly
AssigneeTeradyne, Inc.
InventorsKevin A. Thompson, Isaac N. Silva
Life of this patent
Estimating the term…
Abstract
An example test system includes a test head and a probe card assembly connected to the test head. The probe card assembly includes: a probe card having electrical contacts, a stiffener connected to the probe card to impart rigidity to the probe card, and a heater to heat to at least part of the probe card assembly. A prober is configured to move a device under test (DUT) into contact with the electrical contacts of the probe card assembly.
Claims23
A test system comprising:
- a test head;
- a probe card assembly connected to the test head, the probe card assembly comprising:
- a probe card having electrical contacts;
- a stiffener connected to the probe card to impart rigidity to the probe card;
- and
- a heater to heat to at least part of the probe card assembly;
- and
- a prober to move a device under test into contact with the electrical contacts of the probe card assembly.
5 more elements
A method comprising:
- detecting a temperature of a probe card in a probe card assembly, the probe card assembly comprising:
- the probe card, the probe card having electrical contacts,
- a stiffener that is connected to the probe card to impart rigidity to the probe card, and
- a heater to heat to the stiffener;
- detecting a temperature of the stiffener;
- and
- controlling the heater to impart heat to the stiffener based on the temperature detected for the probe card and for the stiffener.
4 more elements
A method comprising:
- detecting a temperature of a probe card assembly, the probe card assembly comprising:
- a probe card having electrical contacts,
- a stiffener connected to the probe card to impart rigidity to the probe card, and
- a heater to heat to the stiffener;
- and
- controlling the heater to impart heat to the probe card assembly based on the temperature detected during soak of the probe card assembly in hot air.
3 more elements
Dependencies are inferred from the claim text.