Three-Dimensional Image Inspection Device, Three-Dimensional Image Inspection Method, Three-Dimensional Image Inspection Program, And Computer-Readable Recording Medium And Recording Equipment

A three-dimensional image inspection device for conducting outer appearance inspection, based on height information of an inspection object, the three-dimensional image inspection device comprising:

• a first light projecting/receiving part configured to apply measurement light to the inspection object at a first incident angle, and receive reflected light reflected from the inspection object at a first reflection angle;
• a second light projecting/receiving part configured to apply measurement light to the inspection object at a second incident angle, and receive reflected light reflected from the inspection object at a second reflection angle;
• a three-dimensional data generation part configured to generate first three-dimensional data, based on first light receiving amount data obtained from the first light projecting/receiving part, and generate second three-dimensional data, based on second light receiving amount data obtained from the second light projecting/receiving part in accordance with a principle of triangulation;
• a composed image generation part configured to compose the first three-dimensional data and the second three-dimensional data, and generate a three-dimensional composed image having information in a height direction;
• a display part configured to display the three-dimensional composed image composed by the composed image generation part;
• a composition mode selection part configured to enable a first composition mode and a second composition mode to be selected when the composed image generation part generates the three-dimensional composed image, the first composition mode being a mode in which the three-dimensional composed image is generated based on the three-dimensional data measured by both the first light projecting/receiving part and the second light projecting/receiving part with respect to respective pixels configuring the three-dimensional composed image, and the second composition mode being a mode in which the three-dimensional composed image is generated based on the three-dimensional data measured by any one or both of the first light projecting/receiving part and the second light projecting/receiving part with respect to the respective pixels configuring the three-dimensional composed image;
• and
• an inspection part configured to conduct the outer appearance inspection of the inspection object, based on the three-dimensional composed image composed by the composed image generation part.