Pressure sensor state detection method and system
AssigneeAzbil Corporation
InventorsTakuya ISHIHARA, Masaru SOEDA, Masashi SEKINE, Hidenobu TOCHIGI
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Abstract
To enable early detection of abnormal states including accumulation on a pressure sensor, a characteristic measuring portion obtains a change in an output of a pressure sensor in a state in which the temperature of a sensor chip is changed by operation of a temperature controlling portion and thereby obtains a sensor characteristic indicating the change in the output. A state determination portion determines an abnormal state of a diaphragm by comparing the sensor characteristic obtained by the characteristic measuring portion with a reference characteristic, used as a reference, stored in a reference value storing portion.
Claims12
A pressure sensor state detection method for detecting a state of a pressure reception portion of a pressure sensor that detects a displacement of the pressure reception portion as a change in capacitance, the pressure sensor comprising a sensor chip having the pressure reception portion that receives a pressure from a measurement target, the pressure reception portion being displaceable, the pressure sensor state detection method comprising:
- obtaining a change in an output of the pressure sensor while changing a temperature of the sensor chip;
- and
- determining an abnormal state of the pressure reception portion by comparing a sensor characteristic indicating the obtained change in the output with a reference characteristic.
A pressure sensor state detection system, comprising:
- a pressure sensor detecting a displacement of a pressure reception portion as a change in capacitance, the pressure sensor comprising a sensor chip having the pressure reception portion that receives a pressure from a measurement target, the pressure reception portion being displaceable;
- a temperature controlling portion changing a temperature of the sensor chip;
- a characteristic measuring portion obtaining a sensor characteristic indicating a change in an output by obtaining a change in an output of the pressure sensor while the temperature controlling portion changes the temperature of the sensor chip;
- and
- a state determination portion determining an abnormal state of the pressure reception portion by comparing a sensor characteristic obtained by the characteristic measuring portion with a reference characteristic.
Dependencies are inferred from the claim text.