Pressure sensor, production method for pressure sensor, altimeter, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorShinichi YOTSUYA
Life of this patent
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Abstract
A pressure sensor includes an SOI substrate which has a first silicon layer, a second silicon layer placed on one side of the first silicon layer, and a silicon oxide layer placed between the first and second silicon layers, and a concave section which opens to the surface on the first silicon layer side of the SOI substrate, wherein in a plan view of the SOI substrate, a portion overlapping the concave section of the SOI substrate becomes a diaphragm which is flexurally deformed by receiving a pressure, and the second silicon layer is exposed on the bottom surface of the concave section.
Claims20
A pressure sensor, comprising:
- a substrate which has a first silicon layer, a second silicon layer placed on one side of the first silicon layer, and a silicon oxide layer placed between the first silicon layer and the second silicon layer;
- and
- a concave section which opens to the surface on the first silicon layer side of the substrate, wherein
- in a plan view of the substrate, a portion overlapping the concave section of the substrate becomes a diaphragm which is flexurally deformed by receiving a pressure, and
- the second silicon layer is exposed on the bottom surface of the concave section.
A production method for a pressure sensor, comprising:
- preparing a substrate which has a first silicon layer, a second silicon layer placed on one side of the first silicon layer, and a silicon oxide layer placed between the first silicon layer and the second silicon layer;
- and
- forming a concave section which opens to the surface on the first silicon layer side of the substrate to expose the second silicon layer on the bottom surface of the concave section, and forming a diaphragm which is flexurally deformed by receiving a pressure in a portion overlapping the concave section of the substrate in a plan view of the substrate.
Dependencies are inferred from the claim text.